Resolution limit of mode-localised sensors

Zhang, Zhao; Chang, Honglong

doi:10.1007/s11432-020-2974-9

Cited by 13 publications

(6 citation statements)

References 27 publications

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“…Our results show that, by harnessing nonlinearity in phonon-cavity system, intriguing opportunities emerge for high-performance frequency-shift-based sensors and transducers 43 – 50 . Specifically, compared with MEMS sensors and transducers using single-DOF nonlinear resonators 51 or multiple coupled resonators 52 , 53 , the nonlinear phonon-cavity system in this work could potentially offer greater responsivity, additional control, smaller device footprint, and simplified system design, thus resulting in improved performance in MEMS-based sensing and signal transduction applications.…”

Section: Resultsmentioning

confidence: 99%

Nonlinearity-mediated digitization and amplification in electromechanical phonon-cavity systems

Miao

Zhou

et al. 2022

Nat Commun

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Electromechanical phonon-cavity systems are man-made micro-structures, in which vibrational energy can be coherently transferred between different degrees of freedom. In such devices, the energy transfer direction and coupling strength can be parametrically controlled, offering great opportunities for both fundamental studies and practical applications such as phonon manipulation and sensing. However, to date the investigation of such systems has largely been limited to linear vibrations, while their responses in the nonlinear regime remain yet to be explored. Here, we demonstrate nonlinear operation of electromechanical phonon-cavity systems, and show that the resonant response differs drastically from that in the linear regime. We further demonstrate that by controlling the parametric pump, one can achieve nonlinearity-mediated digitization and amplification in the frequency domain, which can be exploited to build high-performance MEMS sensing devices based on phonon-cavity systems. Our findings offer intriguing opportunities for creating frequency-shift-based sensors and transducers.

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Section: Resultsmentioning

confidence: 99%

Nonlinearity-mediated digitization and amplification in electromechanical phonon-cavity systems

Miao

Zhou

et al. 2022

Nat Commun

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“…It has been proven that the sensitivity of weakly coupled resonators using the amplitude ratio | X 1 / X 2 | of two resonators as an output metric is several orders of magnitude higher than that using the conventional frequency shift as an output metric, which provides a new sensing mechanism with high sensitivity. As a result of the increase of the parametric sensitivity, the resolution limit of the mode-localized sensors can also be improved by orders of magnitude especially when more than 2-DoF resonators are coupled together, which has first been theoretically validated in [ 81 ].…”

Section: Fundamentals Of Baw Resonatorsmentioning

confidence: 99%

A Review on Coupled Bulk Acoustic Wave MEMS Resonators

Wang

et al. 2022

Sensors

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With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and sensing theory, the transduction mechanism, and the applications. BAW MEMS resonators normally exhibit two types of vibration modes: lateral (in-plane) modes and flexural (out-of-plane) modes. Compared to flexural modes, lateral modes exhibit a higher stiffness with a higher operating frequency, resulting in a lower internal loss. Also, the lateral mode has a higher Q factor, as the fluid damping imposes less influence on the in-plane motion. The coupled BAW MEMS resonators in these two vibration modes are investigated in this work and their applications for sensing, timing, and frequency reference are also presented.

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“…Regarding the problem of resolution of mode-localized sensors, there are mainly two different views. J. Juillard et al [96,97] hold the view that mode-localized sensors based on the amplitude ratio output metric provide measurements whose resolution is independent on coupling strength, while A. Seshia [98] and Chang [99] believe that that the resolution of mode-localized sensors is dependent on the strength of internal coupling k. They believe that weaker effective coupling (lower k) between the resonators should help enhance not only the sensitivity of such sensors, but also contribute to substantial improvements in the resolution. Different views of resolution limit models are shown in Table 5.…”

Section: Resolution Of Scrb Sensorsmentioning

confidence: 99%

“…Chang [99] also pointed out that the resolution of AR-based mode-localized sensors can be improved by increasing DoFs in the resonant system, and the resolution limit of the high-order (the DoFs > 3) mode-localized sensors using the AR output metric is better than that of the frequency-output metric, as shown in Table 6. They revealed that the 3-DoF mode-localized sensors using the AR output metric have a better resolution limit than both the 2-DoF and frequency-output sensors, and the 4-DoF sensors indicate the best resolution limit, which is three orders better than 3-DoF.…”

Section: Resolution Of Scrb Sensorsmentioning

confidence: 99%

Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

et al. 2021

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Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.

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Resolution limit of mode-localised sensors

Cited by 13 publications

References 27 publications

Nonlinearity-mediated digitization and amplification in electromechanical phonon-cavity systems

Nonlinearity-mediated digitization and amplification in electromechanical phonon-cavity systems

A Review on Coupled Bulk Acoustic Wave MEMS Resonators

Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

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