2008
DOI: 10.1016/j.ultramic.2008.04.078
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Resolution enhancing using cantilevered tip-on-aperture silicon probe in scanning near-field optical microscopy

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Cited by 19 publications
(6 citation statements)
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“…One of the potential applications is the lithography by photoirradiation or electron beam exposition in vacuum conditions, where the desired pattern of metal clusters at the micro- and nanoscale can be created by controlled decomposition of metal carbonyl vapor above a substrate. , Such a technique of electron beam decomposition of W(CO) 6 precursor gas performed on the top of a scanning near-optical field microscope (SNOM) cantilever allows one to create a metal whisker, further used as an atomic force microscopy (AFM) tip to obtain simultaneously SNOM and AFM images of the investigated surface . Further, the nanolithography technique could be developed by applying a scanning tunneling microscope attempting to decompose locally the metal carbonyl vapor above a substrate surface by voltage pulses on the tip .…”
Section: Introductionmentioning
confidence: 99%
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“…One of the potential applications is the lithography by photoirradiation or electron beam exposition in vacuum conditions, where the desired pattern of metal clusters at the micro- and nanoscale can be created by controlled decomposition of metal carbonyl vapor above a substrate. , Such a technique of electron beam decomposition of W(CO) 6 precursor gas performed on the top of a scanning near-optical field microscope (SNOM) cantilever allows one to create a metal whisker, further used as an atomic force microscopy (AFM) tip to obtain simultaneously SNOM and AFM images of the investigated surface . Further, the nanolithography technique could be developed by applying a scanning tunneling microscope attempting to decompose locally the metal carbonyl vapor above a substrate surface by voltage pulses on the tip .…”
Section: Introductionmentioning
confidence: 99%
“…10,11 Such a technique of electron beam decomposition of W(CO) 6 precursor gas performed on the top of a scanning near-optical field microscope (SNOM) cantilever allows one to create a metal whisker, further used as an atomic force microscopy (AFM) tip to obtain simultaneously SNOM and AFM images of the investigated surface. 12 Further, the nanolithography technique could be developed by applying a scanning tunneling microscope attempting to decompose locally the metal carbonyl vapor above a substrate surface by voltage pulses on the tip. 13 As a scanning tunneling microscope (STM) allows a tip positioning on the atomic level, it might give atomic-scale information on the mechanism of decomposition and realize a controlled atom-by-atom cluster growth.…”
Section: Introductionmentioning
confidence: 99%
“…10d). 220 Both tipenhanced and tip-on-aperture NSOM offer greater resolution as compared to the other two NSOM-AFM approaches and have achieved lateral resolutions as low as 10-30 nm. 188 Although NSOM-AFM is not as widely used as FM-AFM, a few groups have pursued research related to disease with this technique.…”
Section: Near-eld Scanning Optical Microscopy-atomic Force Microscop...mentioning
confidence: 99%
“…Metal carbonyls sublimate at relatively low temperature and can be easily decomposed by ultraviolet light or electron beam irradiation. They are thus suitable for numerous applications through nano‐controlled deposition techniques under vacuum conditions . For example, the carbonyl deposits can be used either in microelectronics or as supported metal catalysts .…”
Section: Introductionmentioning
confidence: 99%