Resist materials for proton beam writing: A review

Kan, J.A. van; Malar, P.; Wang, Y.H.

doi:10.1016/j.apsusc.2014.04.147

Cited by 37 publications

(21 citation statements)

References 67 publications

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“…Taking account of the penetration depth of 150 keV protons presented in the TRIM depth profiles (Fig. S1), microstructures with a higher aspect ratio can be reliably generated even at a fluence of 3 · 10 15 ions cm À2 within the film thickness of 1.5 lm [32].…”

Section: Fabrication Of Gcms By Ion Beam Contact Lithography and Carbmentioning

confidence: 99%

A simple PAN-based fabrication method for microstructured carbon electrodes for organic field-effect transistors

Jung

Kim

Jung

et al. 2015

Carbon

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Section: Fabrication Of Gcms By Ion Beam Contact Lithography and Carbmentioning

confidence: 99%

A simple PAN-based fabrication method for microstructured carbon electrodes for organic field-effect transistors

Jung

Kim

Jung

et al. 2015

Carbon

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“…Second, focused proton beam writing (PBW) has been used for microfabrication of inorganic materials [31,32] and hard polymers [33][34][35][36] for decades. PBW is a novel technique that draws by a focused proton beam with an energy of the order of MeV on target materials [37].…”

Section: Introductionmentioning

confidence: 99%

Development of Advanced Biodevices Using Quantum Beam Microfabrication Technology

Oyama

Kimura

Nagasawa

et al. 2020

QuBS

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Biodevices with engineered micro- and nanostructures are strongly needed for advancements in medical technology such as regenerative medicine, drug discovery, diagnostic reagents, and drug delivery to secure high quality of life. The authors produced functional biocompatible plastics and hydrogels with physical and chemical properties and surface microscopic shapes that can be freely controlled in three dimensions during the production process using the superior properties of quantum beams. Nanostructures on a biocompatible poly(L-lactic acid) surface were fabricated using a focused ion beam. Soft hydrogels based on polysaccharides were micro-fabricated using a focused proton beam. Gelatin hydrogels were fabricated using γ-rays and electron beam, and their microstructures and stiffnesses were controlled for biological applications. HeLa cells proliferated three-dimensionally on the radiation-crosslinked gelatin hydrogels and, furthermore, their shapes can be controlled by the micro-fabricated surface of the hydrogel. Long-lasting hydrophilic concave structures were fabricated on the surface of silicone by radiation-induced crosslinking and oxidation. The demonstrated advanced biodevices have potential applications in three-dimensional cell culture, gene expression control, stem cell differentiation induction/suppression, cell aggregation into arbitrary shapes, tissue culture, and individual diagnosis in the medical field.

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“…The method of micromachining of materials using deep ion beam lithography was first presented in 1997 [1] and well established in the following years [2]. Since then various properties of different types of materials have been shown to be sensitive to MeV energy proton beam irradiation [3]. Among these materials, poly(tetrafluoroethylene) is one whose surface structure can be modified with MeV proton beams.…”

Section: Introductionmentioning

confidence: 99%

Comparison of Low and High Current Density Proton Irradiation Effects on the Surface Morphology of Poly(tetrafluoroethylene)

2019

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A comparison is given about the effects of low and high current density proton irradiations on the surface topography of poly(tetrafluoroethylene). 1 MeV proton beam was used for the experiments with 10 and 10 8 pA/mm 2 current densities. For the high current density irradiations, the beam was micro-focused, while for the low current density beam it was highly under-focused. The applied ion fluences were 0.1-1000 nC/mm 2 (6.24 × 10 10-6.24 × 10 14 ion/cm 2). Differential interference contrast microscopy, surface profilometry, and scanning electron microscopy were used to investigate the changes of the surface morphology. It is found that at low fluences the surface is etched similarly due to low and high current density irradiations, while at high fluences thermal processes differentiate the behaviour of the surface.

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Resist materials for proton beam writing: A review

Cited by 37 publications

References 67 publications

A simple PAN-based fabrication method for microstructured carbon electrodes for organic field-effect transistors

A simple PAN-based fabrication method for microstructured carbon electrodes for organic field-effect transistors

Development of Advanced Biodevices Using Quantum Beam Microfabrication Technology

Comparison of Low and High Current Density Proton Irradiation Effects on the Surface Morphology of Poly(tetrafluoroethylene)

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