Residual stresses of diamond and diamondlike carbon films

Abstract

This paper evaluated the internal stresses of different diamond and diamondlike carbon ͑DLC͒ coatings. For the diamond coatings, the stresses were determined using micro-Raman spectroscopy and x-ray diffraction ͑XRD͒, while the stresses of DLC films were determined with bent plate method. The internal stress was related to the structural properties of the coatings. Direct current plasma jet, combustion flame, and microwave chemical-vapor deposition processes were used to prepare the diamond coatings on the tungsten carbide or molybdenum substrates, while the DLC films were deposited on the silicon wafers with filtered cathodic vacuum arc process. From the Raman spectra of the diamond coatings, the compressive internal stresses were determined, which were related to the microstructure of the coatings. The results from XRD were comparable with those obtained from micro-Raman spectroscopy. Higher compressive residual stresses in the DLC films were noticed, which were also related to their chemical bonding nature as well as their microstructures.

Manufacturing and Characterization of a Carbon-Based Amorphous (a-CNX) Coating Material

“…At low discharge voltage, the incoming sputtered carbon ions or atoms do not have enough energy to form sp 3 bonds, rather graphitization occurs. However, in our case at higher peak discharge voltage ([ 1000 V), the high energy ion bombardment of the growing films damages the sp 3 sites and thus facilitates to form sp 2 hybridization through the conversion of sp 3 bonds [30,57,58]. Furthermore, graphitization in the a-CN X coating can also be realized by the presence of high percentage (33.33% in partial pressure) of N 2 gas in the deposition process.…”

RSM base study of the effect of deposition temperature and hydrogen flow on the wear behavior of DLC films

“…In the DLC film growth process, multiple deposition parameters such as deposition temperature, deposition atmosphere, flow rate, deposition method often play role simultaneously [9]. For expanding applications of the DLC films, a greater understanding of the complicated parametric effects of the deposition conditions on the DLC properties is necessary [10].…”

Incorporated W Roles on Microstructure and Properties of W-C:H Films by a Hybrid Linear Ion Beam Systems

“…Due to its unique properties such as high hardness, low friction coefficient, good chemical inertness, and the optical transparency in a wide range of VIS-IR, DLC film has been used as protective coatings in many industrial fields [1]. However, high residual stress is the major drawback of DLC films for its wider practical application [2][3][4][5][6]. Immense amounts of concrete research have shown that the incorporation of metal elements, such as Mo, Cu, Al, Cr, and W, is one of the good methods to decrease the internal stress of DLC films [7][8][9][10][11][12].…”