2003
DOI: 10.1016/s0008-6223(03)00071-x
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Residual stresses and crystalline quality of heavily boron-doped diamond films analysed by micro-Raman spectroscopy and X-ray diffraction

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Cited by 100 publications
(51 citation statements)
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“…On the other side, the free radical was only detected at highly boron doped diamond films, condition in which the sp 2 and another impurities such as tungstein carbide (WC) [45,47] and clusters of doping boron atoms [44,48] increase, but the influence of these parameters in our results were not yet evaluated.…”
Section: Resultsmentioning
confidence: 91%
“…On the other side, the free radical was only detected at highly boron doped diamond films, condition in which the sp 2 and another impurities such as tungstein carbide (WC) [45,47] and clusters of doping boron atoms [44,48] increase, but the influence of these parameters in our results were not yet evaluated.…”
Section: Resultsmentioning
confidence: 91%
“…B-doped chemical-vapor-deposited (CVD) diamond films are widely applied in semiconductor and electrochemical devices [4]. Generally, doped boron atoms substitute for carbon atoms and/or occupy neutrally interstitial positions depending on the doping level [5,6]. In addition, B-doping is presented not only in crystalline grains but also at grain boundaries [7].…”
Section: Introductionmentioning
confidence: 99%
“…In these cases, B-doping leads to changes in lattice parameters and introduces acceptor impurity energy levels near the top of the valence band, and consequently, influences the band structure and optoelectronic properties of those B-doped films [1][2][3][4][5]. As important and powerful nondestructive characterization techniques, Raman spectroscopy and X-ray diffraction (XRD) have been extensively proposed to analyze crystalline structure, boron concentration, and residual stress in B-doped diamond films [6,8,9]. In previous work, thick (with thicknesses of more than ten or ten's microns) B-doped diamond films (including CVD freestanding polycrystalline films and single crystals) have been widely studied [3,4,[10][11][12][13][14] and applied in a variety of fields, such as electrochemistry electrodes, superconductors, and diamond-based optoelectronic devices.…”
Section: Introductionmentioning
confidence: 99%
“…Agreement between these two techniques is not straightforward, [29,30] due to several reasons, including the different domain size of the two techniques and several technical difficulties, as those encountered for the determination of the strain in the SiC phase.…”
Section: X-ray Resultsmentioning
confidence: 99%