Abstract:This paper utilizes pulse reverse plating to control the residual stress in electroplated Copper MEMS structures. The residual stress plays a significant role in many MEMS devices and control (not just minimization) over it is desirable. We have tuned the stress either compressive or tensile for different plating parameters, without utilizing any additives in the bath or annealing in the process. We demonstrate the use of this technique using a UV-LIGA fabricated microstrain gauge, that is also utilized to mea… Show more
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