2002
DOI: 10.1016/s0040-6090(02)00680-6
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Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction

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Cited by 247 publications
(79 citation statements)
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“…In agreement with previous studies [10,13], the distributions are linear. In addition, the diffraction line is assessable at all tilting angles, thus confirming the absence of sharp preferential growth orientation in the coating.…”
supporting
confidence: 93%
See 1 more Smart Citation
“…In agreement with previous studies [10,13], the distributions are linear. In addition, the diffraction line is assessable at all tilting angles, thus confirming the absence of sharp preferential growth orientation in the coating.…”
supporting
confidence: 93%
“…The impact of the four coating strategies on the average residual stress of the TiN films was determined using the modified sin 2 ψ method under a fixed grazing incidence angle of 1° [10]. This allowed for maintaining a nearly fixed penetration depth of 400 nm that comprises the entire coating thickness.…”
Section: Residual Stress Analysesmentioning
confidence: 99%
“…These nitrides include TiN, CrN, VN and ZrN [415][416][417][418][419][420][421][422][423][424][425][426]; they have distinct chemical and physical properties. As an example, TiN oxidizes steadily at temperatures above 500 8C, leading to the formation of poorly TiO 2 adherent rutile phase oxide layer on top of the TiN.…”
Section: Transition Metal Nitride Coatingsmentioning
confidence: 99%
“…The presumably undamaged hematite and magnetite layers grown after heating-up to 650°C, holding for 1 s and cooling down to RT were investigated based on the modified sin 2 w-method realized in the combined x/w mode. For details regarding the method the reader is referred to [24][25][26][27][28].…”
Section: Ex Situ Analysis Of Residual Stresses and Their Gradientsmentioning
confidence: 99%