Residual stress in diamond films: origins and modelling

Michler, J.; Mermoux, Michel; Kaenel, Y. von; Haouni, A.; Lucazeau, G.; Blank, E.

doi:10.1016/s0040-6090(99)00528-3

Cited by 79 publications

(39 citation statements)

References 20 publications

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“…However, Eqn (4) is not valid if bending of the substrate is allowed or if the thickness of the film is higher than a few micrometres. 20 A complete modelling of the thermal stress formation shows that it is a complex function of both the thickness and the elastic properties of the film and substrate. Structural mismatch between the substrate and the film, defects within the film, grain boundaries, etc, may be responsible for the intrinsic stress.…”

Section: Stress Measurementsmentioning

confidence: 99%

In situ Raman monitoring of the growth of CVD diamond films

Mermoux

Marcus

Abello

et al. 2003

J Raman Spectroscopy

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Raman spectroscopy was applied to monitor the growth of diamond in different plasma-assisted chemical vapour deposition reactors. A gated, multichannel detection system was used to discriminate against the high level of background radiation produced by the plasma and the hot substrate. As a result, Raman spectra could be taken during diamond growth without interruption of the process. The ability to detect and distinguish between diamond and non-diamond phases during film growth is demonstrated. A sufficient signal-to-noise ratio in the spectra was achieved for stress formation to be observed.

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Section: Stress Measurementsmentioning

confidence: 99%

In situ Raman monitoring of the growth of CVD diamond films

Mermoux

Marcus

Abello

et al. 2003

J Raman Spectroscopy

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“…In some cases, there can be significant plastic deformation of the Si substrate during diamond film growth. 11,16 This is problematic because it invalidates Eq. ͑5͒, which is based on an elastic substrate.…”

Section: ͑5͒mentioning

confidence: 99%

Intrinsic stress, island coalescence, and surface roughness during the growth of polycrystalline films

Sheldon

Lau

Rajamani

2001

Journal of Applied Physics

107

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During film growth by a variety of techniques, intrinsic tensile stresses can be created by the coalescence of neighboring islands. Experimental results with diamond films produced by chemical vapor deposition are compared with a relatively simple model to demonstrate that a realistic interpretation of these coalescence stresses must account for effects that are associated with surface roughness. First, the interpretation of curvature measurements during the early stages of film growth must account for this surface roughness. Also, the experiments show that tensile stresses are induced by grain boundary formation during continuing growth after the initial island coalescence event. This understanding differs from the traditional interpretation that continuing intrinsic stress is produced by ''templated'' growth onto an already strained crystalline lattice. A kinetic model of stress evolution during postcoalescence growth is also presented.

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“…The stress values of x%-ZnO-700 series samples are positive, it is a tensile stress. In terms of the grain boundary relaxation model, it was proposed that the tensile stress is related to voided microstructure at the grain boundary [28]. The different strains in the two series of x%-ZnO samples can be explained as due to the sintering effect at a high temperature.…”

Section: Rietveld Refinement and Strain Analysismentioning

confidence: 99%

Spray drying assisted assembly of ZnO nanocrystals using cellulose as sacrificial template and studies on their photoluminescent and photocatalytic properties

Yuan

Wang

et al. 2017

Colloids and Surfaces A: Physicochemical and Engineering Aspect

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Zincoxen cellulose solution was used as raw materials for the preparation of zincoxen/cellulose complex microspheres via a spray drying process. The obtained zincoxen/cellulose microspheres were turned into assemblies of ZnO nanocrystals upon calcinations at 500 or 700 . The assemblies of ZnO nanocrystals exhibit high photocatalytic activity for methyl orange degradation under ultraviolet light irradiation in aqueous solution and also satisfied reusability and stability of morphology and composition.Page 3 of 24 A c c e p t e d M a n u s c r i p t Highlight Spray drying technique was utilized for the preparation of ZnO nanocrystal assemblies using zincoxen cellulose solution as raw materials.Zincoxen plays both the role as solvent for cellulose and precursor for the ZnO nanocrystals.Cellulose acts as assembly agent during the spray drying step and sacrificial templates in the calcinations processThe content of cellulose and the calcination temperature influence the properties of the resulted ZnO nanocrystal assembliesThe assemblies of ZnO nanocrystals exhibit high photocatalytic activity for methyl orange degradation in aqueous solution.Page 4 of 24

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Residual stress in diamond films: origins and modelling

Cited by 79 publications

References 20 publications

In situ Raman monitoring of the growth of CVD diamond films

In situ Raman monitoring of the growth of CVD diamond films

Intrinsic stress, island coalescence, and surface roughness during the growth of polycrystalline films

Spray drying assisted assembly of ZnO nanocrystals using cellulose as sacrificial template and studies on their photoluminescent and photocatalytic properties

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