Residual Layer Self‐Removal in Imprint Lithography

Dumond, Jarrett; Low, Hong Yee

doi:10.1002/adma.200701659

Cited by 18 publications

(16 citation statements)

References 27 publications

(26 reference statements)

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“…Imprint methods were first envisioned as a high-resolution, low-cost alternative to traditional photolithograpic techniques for micro- and nanoscale pattern replication rather than fabrication of distinct particles. Particle fabrication has been a challenge due in large part to the persistent formation of a residual layer of molded material, called a flash layer, which connects the potential particles 62. Much attention has been directed towards the removal or avoidance of this flash layer with the goal of particle fabrication.…”

Section: Imprint Lithography Methodsmentioning

confidence: 99%

Scalable, Shape-Specific, Top-Down Fabrication Methods for the Synthesis of Engineered Colloidal Particles

Merkel¹,

Herlihy²,

Nunes³

et al. 2010

Langmuir

210

179

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The search for a method to fabricate non-spherical colloidal particles from a variety of materials is of growing interest. As the commercialization of nanotechnology continues to expand, the ability to translate particle fabrication methods from a laboratory to an industrial scale is of increasing significance. In this article, we examine several of the most readily scalable top-down methods for the fabrication of such shape specific particles and compare their capabilities with respect to particle composition, size, shape and complexity as well as the scalability of the method. We offer an extensive examination of Particle Replication In Non-wetting Templates (PRINT®) with regards to the versatility and scalability of this technique. We also detail the specific methods used in PRINT particle fabrication, including harvesting, purification and surface modification techniques, with examination of both past and current methods.

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Section: Imprint Lithography Methodsmentioning

confidence: 99%

Scalable, Shape-Specific, Top-Down Fabrication Methods for the Synthesis of Engineered Colloidal Particles

Merkel¹,

Herlihy²,

Nunes³

et al. 2010

Langmuir

210

179

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“…First of all, perfluoropolyether (PFPE) elastomers have a lower surface energy, which enables the selective filling of nanoscale cavities in the mold using any organic liquid-without wetting the land area around the cavities-which enables distinct objects or particles to be formed at the micro-and nanoscales without the formation of the interconnecting 'flash layer', which is noted as a major hurdle in traditional imprint lithography. 68 Secondly, organic liquids and sol-gel metal oxide precursors do not swell fluoropolymers like they do silicones, so one can make PRINT particles and particle arrays having a wide range of attributes (surface chemistries, degradation characteristics, deformability). Thirdly, the Teflon-like characteristics of the fluoropolymer mold allows the resultant organic particles to be easily harvested or removed from the mold.…”

Section: Top-down Methods For Shape-specific Particle Fabricationmentioning

confidence: 99%

“…PRINT is unique over the imprint lithography techniques promulgated by Whitesides et al in that PRINT uses elastomeric fluoropolymers instead of silicones, which results in three distinct features not possible with silicones. First of all, perfluoropolyether (PFPE) elastomers have a lower surface energy, which enables the selective filling of nanoscale cavities in the mold using any organic liquid— without wetting the land area around the cavities—which enables distinct objects or particles to be formed at the micro‐ and nanoscales without the formation of the interconnecting ‘flash layer’, which is noted as a major hurdle in traditional imprint lithography 68. Secondly, organic liquids and sol–gel metal oxide precursors do not swell fluoropolymers like they do silicones, so one can make PRINT particles and particle arrays having a wide range of attributes (surface chemistries, degradation characteristics, deformability).…”

Section: Particle Size and Shape Effectsmentioning

confidence: 99%

Top‐down particle fabrication: control of size and shape for diagnostic imaging and drug delivery

Canelas

Herlihy

DeSimone

2009

WIREs Nanomed Nanobiotechnol

146

108

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This review discusses rational design of particles for use as therapeutic vectors and diagnostic imaging agent carriers. The emerging importance of both particle size and shape is considered, and the adaptation and modification of soft lithography methods to produce nanoparticles is highlighted. To this end, studies utilizing particles made via a process called Particle Replication In Non-wetting Templates (PRINT ™ ) are discussed. In addition, insights gained into therapeutic cargo and imaging agent delivery from related types of polymer-based carriers are considered. KeywordsPRINT; nanoparticles; diagnostic imaging; therapeutic drug delivery; shape With rapid development of new pharmaceuticals and contrast agents, the need for the minimization of side effects in concert with simultaneous targeted delivery to specific tissues of interest continues to expand. Overcoming barriers for effective bioavailability of therapeutic agents has been especially challenging in the fields of gene therapy[1] and oncology. [2] As an illustration, despite their potential for wide application, only a few antisense oligonucleotides or small interfering RNA's (siRNA) have entered clinical trials. The prevalence of hydrophobic drugs also necessitates the use of nanocarriers; for these systems, direct dissolution in the bloodstream is limited without the formation of a salt or use of a delivery vector. [3] One solution to this problem is the delivery of drugs, gene therapy agents, and imaging contrast agents via nano-scale vectors, and this has been an area of intense study for decades. Although multiple approaches have been explored and strides have been made in therapeutic drug delivery and diagnostic imaging agent carriers, a set of rules for the rational design of nanocarriers has not yet been fully established due to limited understanding of how all of the carrier properties (including size and shape as well as matrix Cross-References MR relaxation properties of superparamagnetic iron oxide particles Microlithographic delivery devices Nano-encapsulation technology to deliver native protein drugs NIH Public Access Author ManuscriptWiley Interdiscip Rev Nanomed Nanobiotechnol. Author manuscript; available in PMC 2010 July 1. Published in final edited form as:Wiley Interdiscip Rev Nanomed Nanobiotechnol. Rational Design of Drug and Contrast Agent CarriersSeveral critical factors that must be considered in the design of contrast agent and/or polymeric drug carriers include the chemical functionality and mechanical flexibility of the matrix, the degree of cross-linking, if any, the dispersion or encapsulation of the drug within the matrix, the permeability of the cargo through the matrix of the particle, the number and the nature of phases that comprise the particle (one phase versus two or more phases e. g. drug rich phase and matrix rich phase,) the size and shape of the particle, and the surface chemistry. Many of these factors need to be studied and controlled in particle design for the delivery of imaging contrast agent...

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“…Dumond and low developed a method of imprinting resist structures wherein the residual layer is self-removed via failure while desirable resist features are transferred to an external substrate. The uniqueness of this technique is further enhanced by the relative ease with which it can be used to fabricate overhang structures useful for shadowing evaporated materials (Dumond & Low, 2008). Balla et al, discussed the relationship between the residual layer and initial resist thickness.…”

Section: 4mentioning

confidence: 99%

Nanoimprint Lithography

강신일¹

2016

Encyclopedia of Nanotechnology

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Residual Layer Self‐Removal in Imprint Lithography

Cited by 18 publications

References 27 publications

Scalable, Shape-Specific, Top-Down Fabrication Methods for the Synthesis of Engineered Colloidal Particles

Scalable, Shape-Specific, Top-Down Fabrication Methods for the Synthesis of Engineered Colloidal Particles

Top‐down particle fabrication: control of size and shape for diagnostic imaging and drug delivery

Nanoimprint Lithography

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