2019
DOI: 10.1088/1361-6501/ab188f
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Residual flatness and scale calibration for a point autofocus surface topography measuring instrument

Abstract: Point autofocus instruments are often used for measuring the surface topography of objects with complex geometry. Determining the metrological characteristics of the instrument is key to ensuring a traceable areal surface topography measurement. In this work, several metrological characteristics, as outlined in ISO/FDIS 25178-600, are determined for a commercial point autofocus instrument, including flatness deviation, the amplification and linearity of the lateral and vertical axes, and the perpendicularity b… Show more

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Cited by 28 publications
(21 citation statements)
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“…A wide set of different technologies have been developed to enable surface topography measurements. 15,16 Among the most widely used technologies for measuring surfaces, we mention contact probes (e.g., CMM and contact stylus instruments 15 ), optical probes (point autofocus instruments 42,43 ), and surface topography optical instruments (like focus variation microscopes or coherence scanning interferometers 15 ). They measure a cloud of points, resulting in a set of surface heights as a function z(x, y) of plane coordinates (x, y).…”
Section: Standard Characterization and Protocolmentioning
confidence: 99%
“…A wide set of different technologies have been developed to enable surface topography measurements. 15,16 Among the most widely used technologies for measuring surfaces, we mention contact probes (e.g., CMM and contact stylus instruments 15 ), optical probes (point autofocus instruments 42,43 ), and surface topography optical instruments (like focus variation microscopes or coherence scanning interferometers 15 ). They measure a cloud of points, resulting in a set of surface heights as a function z(x, y) of plane coordinates (x, y).…”
Section: Standard Characterization and Protocolmentioning
confidence: 99%
“…No filtering or standard operator was applied, to avoid the removal of structure and enhance disturbances management method differences. 89 Average and confidence interval, at 95% confidence level, of the parameters were computed, to test…”
Section: Materials and Methods-case Studiesmentioning
confidence: 99%
“…This involved a prior levelling, the management of measurement disturbances and the evaluation of the surface topography parameter presented in Equation (). No filtering or standard operator was applied, to avoid the removal of structure and enhance disturbances management method differences 89 . Average and confidence interval, at 95% confidence level, of the parameters were computed, to test both the robustness of the disturbance management method to replicated measurements and to assess the presence of significant differences amongst the methods.…”
Section: Materials and Methods—case Studiesmentioning
confidence: 99%
“…Precise surface topography measurement and data analysis are reasonably crucial to evaluate the mechanical behavior of “engineering” surfaces [ 1 ] and are often an integral part of process control [ 2 ]. Surface topography is of great importance, as an example, when the oil consumption mainly caused by the engine’s piston–piston rings cylinder liner system is taken into consideration.…”
Section: Introductionmentioning
confidence: 99%