Research to the Uniformity of Ni-Co Alloy Electroforming

Pei, He Zhong; Zhang, Jun; Zhang, Guo Liang; Huang, Pan

doi:10.4028/www.scientific.net/amr.479-481.497

Cited by 5 publications

(2 citation statements)

References 12 publications

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“…So far, several methods have been used to improve the thickness uniformity, mostly including optimizing electroforming parameters [8], adding additives [9], using pulse or reverse-pulse current [10], using a copying anode [11], using an assistance electrode and shield [1,12,13], ultrasonic electrodepositing [14,15] and megasonic agitation [5]. The shape of the cathode depends on the photoresist mold, which is critical to the quality of the electroformed structure.…”

Section: Introductionmentioning

confidence: 99%

Improving the Thickness Uniformity of Micro Gear by Multi-Step, Self-Aligned Lithography and Electroforming

et al. 2023

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The thickness nonuniformity of an electroformed layer is a bottleneck problem for electroformed micro metal devices. In this paper, a new fabrication method is proposed to improve the thickness uniformity of micro gear, which is the key element of various microdevices. The effect of the thickness of the photoresist on the uniformity was studied by simulation analysis, which showed that as the thickness of the photoresist increased, the thickness nonuniformity of the electroformed gear should decrease due to the reduced edge effect of the current density. Differently from the traditional method performed by one-step front lithography and electroforming, multi-step, self-aligned lithography and electroforming are used to fabricate micro gear structures in proposed method, which intermittently keeps the thickness of photoresist from decreasing during processes of alternate lithography and electroforming. The experimental results show that the thickness uniformity of micro gear fabricated by the proposed method was improved by 45.7% compared with that fabricated by the traditional method. Meanwhile, the roughness of the middle region of the gear structure was reduced by 17.4%.

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Section: Introductionmentioning

confidence: 99%

Improving the Thickness Uniformity of Micro Gear by Multi-Step, Self-Aligned Lithography and Electroforming

et al. 2023

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“…Currently, there are several methods to improve uniformity, including optimizing electrodeposition process parameters [ 9 ], adding additives [ 10 ], using pulse or reverse-pulse currents [ 11 ], setting auxiliary cathodes [ 12 , 13 , 14 ], adding an insulating shield [ 15 ], using auxiliary anodes [ 16 ], ultrasonic electrodepositing [ 17 , 18 ] and megasonic agitation [ 1 ]. Using auxiliary cathodes is an effective way to decrease the edge effect of a current in the micro electroforming process.…”

Section: Introductionmentioning

confidence: 99%

An Effect of Layered Auxiliary Cathode on Thickness Uniformity in Micro Electroforming Process

et al. 2023

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Thickness nonuniformity is a bottleneck in the micro electroforming process of micro-metal devices. In this paper, a new method of fabricating a layered auxiliary cathode is proposed to improve the thickness uniformity of a micro-electroforming layer. In order to analyze the general applicability of the proposed method, four basic microstructures, namely circular, square, regular triangular, and regular hexagonal were used to study the effect of a layered auxiliary cathode on thickness uniformity through simulation and experimentation. The simulation results showed that with the help of the proposed auxiliary cathode, the thickness nonuniformity of four microstructures should decrease due to the reduced edge effect of the current density. The experimental results showed that the thickness uniformity of four microstructures fabricated via the proposed method was improved by 190.63%, 116.74%, 80.43%, and 164.30% compared to that fabricated via the traditional method, respectively. Meanwhile, the micro-gear was fabricated and the nonuniformity was reduced by 101.15% using the proposed method.

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