2017
DOI: 10.1007/s11465-017-0411-8
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Research progress on ultra-precision machining technologies for soft-brittle crystal materials

Abstract: Soft-brittle crystal materials are widely used in many fields, especially optics and microelectronics. However, these materials are difficult to machine through traditional machining methods because of their brittle, soft, and anisotropic nature. In this article, the characteristics and machining difficulties of soft-brittle and crystals are presented. Moreover, the latest research progress of novel machining technologies and their applications for softbrittle crystals are introduced by using some representati… Show more

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Cited by 13 publications
(9 citation statements)
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References 53 publications
(56 reference statements)
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“…At present, grinding is one of the most important material processing technologies for realizing precision and ultra-precision machining (Gao et al 2017). The primary motivations of grinding are both to realize material removal and obtain a good surface finish.…”
Section: Processing Techniques For Machining Hard and Brittle Materialsmentioning
confidence: 99%
“…At present, grinding is one of the most important material processing technologies for realizing precision and ultra-precision machining (Gao et al 2017). The primary motivations of grinding are both to realize material removal and obtain a good surface finish.…”
Section: Processing Techniques For Machining Hard and Brittle Materialsmentioning
confidence: 99%
“…Our research team proposed a water-dissolution polishing technique [19,20], in which the water concentration is precisely regulated by micro-emulsion fluid consisting of alcohols, surfactant, and deionized water to achieve controllable deliquescence. The product of deliquescence is then removed by the polishing pad to achieve surface planarization [21][22][23].…”
Section: Introductionmentioning
confidence: 99%
“…As pointed out by Menapace et al . [13] and Gao et al [5], environmental water adsorption on the KDP crystal surface is becoming an additional challenge for the ultra‐precision machining process for such soft and brittle crystals. However, it is still a lack of investigation of the influence of water in the ambient atmosphere on the removal behaviour of KDP crystal, in particular from the microscopic view.…”
Section: Introductionmentioning
confidence: 99%
“…Introduction: Potassium dihydrogen phosphate (KH 2 PO 4 , KDP) crystal has been intensively used as a critical nonlinear optical material in high-power laser systems such as Inertial Confinement Fusion in the National Ignition Facility of USA for laser frequency doubling, electro-optical modulation and photoelectric switch due to its large nonlinear conversion coefficient, high optical uniformity and good transmission band characteristics [1][2][3]. However, KDP crystal is extremely soft (2.5 Mohs hardness), brittle, deliquescent and thermally sensitive, which makes it difficult to fabricate a desirable optical surface with stringent specifications (≤λ/6 transmitted wavefront distortion Peak-Valley (PV), ≤5 nm root-mean-square surface roughness R ms , ≥15 J/cm 2 laser-induced damage threshold) for the aforementioned laser systems [3][4][5]. The ultra-precision machining of KDP crystal has become a challenging subject for academia and industry.…”
mentioning
confidence: 99%
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