Research on Tuning Characteristics of High Precision F-P Cavity

Abstract

In microelectromechanical systems, F-P cavity is one of the most common structures, air cavity thickness of a F-P cavity is about a near wavelength, the thickness of the air cavity is less and the interference series is low, so the reflective phases of the reflectors have much influence on the peak wavelength. The linear relationship between the thickness of an air cavity in a tunable filter and the resonant wavelength is deduced and tested by numerical computation in the article. The research is of practical significance for the design of a F-P cavity tunable wavelength selector.