High voltage (>4000 V) GaN lateral photoconductive semiconductor switches (PCSSs) were developed and characterized. The epitaxial structure consisted of 1.4 μm of semi-insulating GaN grown on a SiC substrate. Intrinsic mode operation, where above bandgap light is used to trigger the PCSS, results in the highest amount of photocurrent. These PCSSs can also be triggered in extrinsic mode, where sub-bandgap illumination excites carriers from extrinsic defect levels, but this results in a significantly lower photocurrent. Triggering at near bandgap with 10 V applied, the on-state photocurrent is over eight magnitudes higher than the dark off-state leakage, indicating extremely high responsivity. A 293 nm picosecond pulse width laser was used to determine the rise time of the PCSS to be ∼160 ps. Various geometry devices were fabricated, and the low voltage on-state current obeyed a linear trend as a function of perimeter/gap optically while optically gating the PCSS, which is analogous to the width/length of a metal oxide semiconductor field effect transistor. Off-state breakdown voltages >4000 V were achieved and were likely limited by the thickness of the GaN epitaxial layer. Wide bandgap photoconductive semiconductor switches (PCSSs), such as GaN PCSSs, have gained recent attention due to high critical electric field strength, high electron saturation velocity, and the ability to provide high power ultrafast devices.1 Previously, extrinsic mode, vertical GaN PCSSs were demonstrated on high resistivity freestanding hydride vapor phase epitaxy (HVPE) GaN substrates.2 However, operation of extrinsic mode PCSSs is governed by optical absorption at defect and/or impurity states located within the semiconductor's bandgap, resulting relatively low optical absorption and therefore low efficiency.3 But this low optical absorption translates into deep optical penetration, on the order of centimeters, which allows for vertical PCSS architectures. Intrinsic mode PCSSs rely on above excitation at or above the bandgap to promote electrons from the valence to conduction band, which can provide fast response time, but limits the penetration depth to only several microns, depending on the optical absorption of the semiconductor and the energy of the photons. This, however, also restricts intrinsic mode PCSSs to lateral architectures. Lateral devices can be easily scaled since the gap dimension is determined by photolithography rather than thick epitaxial growth.GaN PCSSs have previously been demonstrated on semi-insulating GaN achieved by Fe compensation doping in order to reduce leakage currents.4,5 However, Fe is known to have strong memory effects, which can redistribute Fe into subsequent films, as well as a narrow window of acceptable doping levels. 6 In addition, Fe creates deep electron traps (E C -0.9 eV), and deep hole traps (E V -0.9 eV), 7 which is beneficial for creating semi-insulating films, but can also result in charge traps with long time constants leading to current collapse in devices.8 PCSSs with fast response ...