Research on the deposition and properties characterization of novel conductive getter films on the inner wall of accelerator vacuum chamber
Xiaoqin Ge,
Wenjing Ma,
Bangle Zhu
et al.
Abstract:The new generation diffraction-limited storage ring has
small vacuum chamber apertures, resulting in a distributed vacuum
problem. Depositing a Ti-Zr-V NEG film layer on the inner face of
vacuum chambers is an ideal solution for resolving the non-uniform
vacuum distribution problem. However, Ti-Zr-V NEG coatings on the
surface of the vacuum chamber increase its surface resistivity,
which can intensify the wakefield impedance effect. This article
proposes adding conductive Ag to the Ti-Zr-V NEG fi… Show more
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