2014
DOI: 10.1109/tps.2014.2319106
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Research on Similarity Law of Glow Discharge in Argon at Low Pressure by Numerical Simulation

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Cited by 19 publications
(18 citation statements)
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“…Ar þ h. The reaction rate coefficients of (R1)-(R5) are calculated by using the cross sectional data, [23][24][25]27 and the assumed constant reaction rate coefficients for (R6)-(R8) are 6.4 Â 10 À10 cm 3 Ás À1 , 2.3 Â 10 À15 cm 3 Ás À1 , and 1.8 Â 10 6 s À1 , respectively, which are widely used in argon plasma predictions. [28][29][30] The fluid model consists of the species continuity equations, the electron energy equation, and the Poisson equation.…”
Section: Model Descriptionmentioning
confidence: 99%
“…Ar þ h. The reaction rate coefficients of (R1)-(R5) are calculated by using the cross sectional data, [23][24][25]27 and the assumed constant reaction rate coefficients for (R6)-(R8) are 6.4 Â 10 À10 cm 3 Ás À1 , 2.3 Â 10 À15 cm 3 Ás À1 , and 1.8 Â 10 6 s À1 , respectively, which are widely used in argon plasma predictions. [28][29][30] The fluid model consists of the species continuity equations, the electron energy equation, and the Poisson equation.…”
Section: Model Descriptionmentioning
confidence: 99%
“…The charged particle density relations (SL4-SL6) can be derived based on SL2, SL3, the current continuity equation, and the Poisson equation, which was illustrated in our previous work. 16 The average electron temperature relation (SL7) can be explained in general when the reduced electric fields in two similar discharges are the same. The time interval relation (SL8) can be derived based on the gap length relation and the same mean velocity of the particles.…”
Section: Similarity Laws and Discharge Processesmentioning
confidence: 99%
“…No matter what the discharge mechanisms are, the requirements of the similarity law on the particle productions from different physical processes are the same, which can be generally derived from the similarity relations in Table I. According to the similarity relations of the particle density (SL4 and SL5) and time interval relation (SL8), the relationship of the charged particle production rate (dn/dt) in two similar discharge gaps is expressed as 12,16 No.…”
Section: Similarity Laws and Discharge Processesmentioning
confidence: 99%
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“…In recent years, the validity of the similarity law for various discharge modes has attracted more attention from different groups. [5][6][7][8][9] There are many ways to investigate the validity of the similarity law, such as experimental measurements on external parameters (breakdown voltage, discharge current, etc.) and inner parameters (particle density, electric field, etc.…”
Section: Introductionmentioning
confidence: 99%