Research on Signal Demodulation Method of Silicon Micro-Machined Gyroscope

Abstract

We report a silicon micro-machined gyroscope without the driven conformation. The output signal of the gyroscope contains the rolling, yawing, and pitching angular rates information. The principle of signal generation of the gyroscope is described with the equation, and the demodulation method of the gyroscope signals is illustrated by the experimental evidences. Toward the end, the key performances of the gyroscope are also presented.