Research on sensing characteristics of third‐order runway series symmetric microring resonator based on hybrid plasma waveguide and metal insulator metal

Abstract

In this paper, a high-sensitivity refractive index sensor based on a hybrid plasma waveguide and metal-insulator-metal waveguide combined third-order runway series mosaic microring resonator is proposed. In this structure, a GaAs waveguide ring surrounds a gold waveguide ring in the middle, and the innermost layer is a disk made of gold material.The outer groove waveguide is composed of GaAs-air-alloy, and the inner groove waveguide is made of the Gold-Air-Gold material disc. By filling different substances in the groove, the change of refractive index will affect the optical signal strength of the output spectrum. The finite element method simulates the transmission spectrum and electric field distribution of the sensor structure. The amplitude coupling coefficient and attenuation factor affecting the resonator's performance are analyzed, and the structural parameters of the slot waveguide are optimized. The numerical simulation results show that the sensor quality factor of this structure is 1.54 Â 10 4 , the sensitivity is 1.2 Â 10 3 nm/RIU which is about 1.5 times higher than that of the Si ring with the same structure, the detection limit can reach 8.1892 Â 10 À7 RIU, and the free spectral range can reach 109 nm. Compared with the traditional microring structure, this microring has higher design freedom and free spectral range and is more suitable for producing biosensors with high sensitivity, low detection limit, and multi-parameter measurement.