Research on path planning and data processing system for high-precision aspheric measurement

Abstract

Three methods for axisymmetric aspheric measuring are put forward and estimated. In accordance with the requirements of high-precision compensation machining and polishing, a data processing system with high accuracy is presented. The monotonous and super-quadric aspheric equations are used to verify the nonlinear least square fitting method respectively. The result of this investigation shows the adopted algorithm can complete the high-precise curve fitting exactly, and it can effectively evaluate the surface quality of optical component.

An algorithm on dimensional range of machining axisymmetric aspheric surface for machine tool

“…A method for the finishing of aspheric surfaces using fixed abrasives is presented (Yam et al, 2007). The method of measuring the aspheric surface includes interference method, coordinate measuring method, laser scanning method (Ye et al, 2007). A new method for measuring large aspheric surfaces with large slopes based on a scanning deflectometry method in which rotatable devices are used to enlarge the measuring range of the autocollimator (Xiao et al, 2012).…”