Research on One-Dimensional High Frequency Linear Motion Platform

Abstract

Precision motion system is driven directly by high frequency linear motion platform, eliminating the adverse effects brought by mechanical transmission, and greatly improving the rapid reaction capability and the control accuracy of feedback system. The linear motion platform is widely used in various types of high-speed, precision machining equipment. In the paper, the one-dimensional linear motion platform is described, and design solution of mechanical part and control system is also introduced, including working principle and structure of voice coil motor, control methods of grating sensors, circuit of grating sensor, drive and control circuit. Displacement control, speed control and output force control of the one-dimensional linear motion control platform can be achieved. So the one-dimensional linear motion platform can be applied in the movement device in high-precision and high-speed.