Research on NiCoB Diffusion Barrier Film Prepared by Electroless Deposition for ULSI-Cu Metallization

Yang, Zhichao; Chen, X. H.; H., W.; Wang, Y. C.; Chen, K.; Han, J. X.

doi:10.5220/0007439704250433

Proceedings of the International Workshop on Materials, Chemistry and Engineering 2018

DOI: 10.5220/0007439704250433

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Research on NiCoB Diffusion Barrier Film Prepared by Electroless Deposition for ULSI-Cu Metallization

Zhichao Yang

X. H. Chen

W. H.

et al.

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Research on NiCoB Diffusion Barrier Film Prepared by Electroless Deposition for ULSI-Cu Metallization

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