Research on Motion Control and Wafer-Centering Algorithm of Wafer-Handling Robot in Semiconductor Manufacturing
Bing-Yuan Han,
Bin Zhao,
Ruo-Huai Sun
Abstract:This paper studies the AWC (Active Wafer Centering) algorithm for the movement control and wafer calibration of the handling robot in semiconductor manufacturing to prevent wafer surface contact and contamination during the transfer process. The mechanical and software architecture of the wafer-handling robot is analyzed first, which is followed by a description of the experimental platform for semiconductor manufacturing methods. Secondly, the article utilizes the geometric method to analyze the kinematics of… Show more
“…After the SAW devices are prepared and packaged, they ought to be tested with a network analyzer (Figure 3a) to see if the response matches the design values, such as center frequency, insertion loss, and delay time. Due to the tiny size of the UHF SAW sensors, the network analyzer was used in conjunction with a microwave probe station [24]. As shown in Figure 3b, the microwave probe was fixed on the probe stage through After the metal electrode was identified as gold, the effect of different gold film thicknesses on the SAW was explored.…”
Section: Device Performance and Temperature Testmentioning
Highly sensitive surface acoustic wave (SAW) sensors have recently been recognized as a promising tool for various industrial and medical applications. However, existing SAW sensors generally suffer from a complex design, large size, and poor robustness. In this paper, we develop a simple and stable delay line ultra-high frequency (UHF) SAW sensor for highly sensitive detection of temperature. A Z-shaped delay line is specially designed on the piezoelectric substrate to improve the sensitivity and reduce the substrate size. Herein, the optimum design parameters of extremely short-pitch interdigital transducers (IDTs) are given by numerical simulations. The extremely short pitch gives the SAW sensor ultra-high operating frequency and consequently ultra-high sensitivity. Several experiments are conducted to demonstrate that the sensitivity of the Z-shaped SAW delay line sensor can reach up to 116.685°/°C for temperature detection. The results show that the sensor is an attractive alternative to current SAW sensing platforms in many applications.
“…After the SAW devices are prepared and packaged, they ought to be tested with a network analyzer (Figure 3a) to see if the response matches the design values, such as center frequency, insertion loss, and delay time. Due to the tiny size of the UHF SAW sensors, the network analyzer was used in conjunction with a microwave probe station [24]. As shown in Figure 3b, the microwave probe was fixed on the probe stage through After the metal electrode was identified as gold, the effect of different gold film thicknesses on the SAW was explored.…”
Section: Device Performance and Temperature Testmentioning
Highly sensitive surface acoustic wave (SAW) sensors have recently been recognized as a promising tool for various industrial and medical applications. However, existing SAW sensors generally suffer from a complex design, large size, and poor robustness. In this paper, we develop a simple and stable delay line ultra-high frequency (UHF) SAW sensor for highly sensitive detection of temperature. A Z-shaped delay line is specially designed on the piezoelectric substrate to improve the sensitivity and reduce the substrate size. Herein, the optimum design parameters of extremely short-pitch interdigital transducers (IDTs) are given by numerical simulations. The extremely short pitch gives the SAW sensor ultra-high operating frequency and consequently ultra-high sensitivity. Several experiments are conducted to demonstrate that the sensitivity of the Z-shaped SAW delay line sensor can reach up to 116.685°/°C for temperature detection. The results show that the sensor is an attractive alternative to current SAW sensing platforms in many applications.
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