Research on Micro Machining of Slit Grating

Abstract

Micro cutting offers good potentialities in order to manufacture small and medium lot sizes of micro-parts with arbitrary geometry at an economically reasonable expense. This technology has been widely used in many fields, especially in aerospace field and biological medicine. The slit grating which is used for X-ray telescope is difficult to machine because of the small critical dimensions, large material removal rates and the high requirement of machining quality. In this paper, two methods are describes to manufacture the slit grating which include micro-milling and flying-cutting. The focus is on the design of micro tool, optimization of machining parameters, the comparison of machining efficiency and precision of slit grating by micro-milling and flying-cutting.