Research on Measurement and Process of Tungsten-Rhenium Thin Film Thermocouples Sensor

Zhang, Zhongkai; Tian, Bian; Du, Zhe; Yu, Qiuyue; Lin, Qijing; Zhao, Na

doi:10.1109/nems.2018.8556974

Cited by 2 publications

(2 citation statements)

References 9 publications

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“…The voltage–temperature curves of the TFTC and the standard wire thermocouples are shown in Figure 6 and the sensitivity is 17.19 μV/°C. As shown in Figure 6 a, the voltage–temperature curves of the TFTC and standard wire thermocouple have the same trend, they overlap each other and almost appear to be a single line, which indicates that the fabricated TFTC has a high accuracy [ 21 ].…”

Section: Resultsmentioning

confidence: 99%

Horizontal Oxidation Diffusion Behavior of MEMS-Based Tungsten-Rhenium Thin Film Thermocouples

et al. 2022

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Tungsten-rhenium thin film thermocouples (TFTCs) are well suited for the surface temperature monitoring of hot components due to their small size, rapid response and low cost. In this study, a tungsten-rhenium TFTC with SiC protective film on all parts except the pads was fabricated by a microelectromechanical system (MEMS) process. During the low to medium temperature (−40 °C to 500 °C) repeatability test phase, the thermal voltage from the TFTC agreed well with that of the standard tungsten-rhenium thermocouple. However, during the high temperature test phase, the TFTC lost electronic response at around 620 °C. Failure analysis of the TFTC tested at 620 °C was performed by microscopy, scanning electron microscope (SEM), energy dispersive spectroscopy (EDS), laser scanning confocal microscope (LSCM) and statistics. The results showed that the pads were oxidized without the protective layer, the number of oxidized protrusions distributed in this TFTC from the pad to the node decreases more and more slowly and the size of the oxidized protrusions also becomes smaller and smaller. This demonstrates the presence of horizontal oxidation diffusion in TFTCs, further illustrating the importance of pad protection and provides a direction for the subsequent structural optimization and the extension of the service life of TFTCs and other sensors.

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Section: Resultsmentioning

confidence: 99%

Horizontal Oxidation Diffusion Behavior of MEMS-Based Tungsten-Rhenium Thin Film Thermocouples

et al. 2022

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“…It is hoped that prepared TFTCs have strong high temperature resistance and a high thermoelectric voltage output. The tungsten-rhenium TFTCs have been reported for high temperature measurements of up to about 1500 °C [ 22 , 23 , 24 ]. Typical In 2 O 3 -ITO TFTCs have been reported which have shown a higher thermoelectric voltage output (173 mV at 1273 °C) and high temperature stability.…”

Section: Introductionmentioning

confidence: 99%

Effect of Annealing on the Thermoelectricity Properties of the WRe26-In2O3 Thin Film Thermocouples

et al. 2020

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WRe26-In2O3 (WRe26 (tungsten-26% rhenium) and In2O3 thermoelectric materials) thin film thermocouples (TFTCs) have been fabricated based on magnetron sputtering technology, which can be used in temperature measurement. Many annealing processes were studied to promote the sensitivity of WRe26-In2O3 TFTCs. The optimal annealing process of the thermocouple under this kind of RF magnetron sputtering method was proposed after analyzing the properties of In2O3 films and the thermoelectric voltage of TFTCs at different annealing processes. The calibration results showed that the WRe26-In2O3 TFTCs achieved a thermoelectric voltage of 123.6 mV at a temperature difference of 612.9 K, with a sensitivity of up to 201.6 µV/K. Also, TFTC kept a stable thermoelectric voltage output at 973 K for 20 min and at 773 K for two hours. In general, the WRe26-In2O3 TFTCs developed in this work have great potential for practical applications. In future work, we will focus on the thermoelectric stability of TFTCs at higher temperatures.

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Research on Measurement and Process of Tungsten-Rhenium Thin Film Thermocouples Sensor

Cited by 2 publications

References 9 publications

Horizontal Oxidation Diffusion Behavior of MEMS-Based Tungsten-Rhenium Thin Film Thermocouples

Horizontal Oxidation Diffusion Behavior of MEMS-Based Tungsten-Rhenium Thin Film Thermocouples

Effect of Annealing on the Thermoelectricity Properties of the WRe26-In2O3 Thin Film Thermocouples

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