Research on Hybrid Isolation System for Micro-Nano-Fabrication Platform

Fu, Jie; Wang, Yuan; Li, Peidong; Yu, Miao

doi:10.1155/2014/243247

Cited by 16 publications

(12 citation statements)

References 22 publications

(21 reference statements)

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“…Fu et al have also developed a semi-active/fully-active hybrid isolator using magnetorheological elastomer and piezoelectric material. They found that the natural frequency can be shifted by approximately 20 Hz by applying an exciting current of 1 A to the electromagnet [ 14 ].…”

Section: Introductionmentioning

confidence: 99%

Magnetically Tunable Vibration Transmissibility for Polyurethane Magnetic Elastomers

et al. 2018

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Abstract:The effect of a weak magnetic field on vibration transmissibility was investigated for magnetic elastomers with various volume fractions of magnetic particles. Polyurethane elastomers without magnetic particles exhibited a natural frequency at 53 Hz and were insensitive to a magnetic field of 60 mT. The natural frequency for magnetic elastomers with a volume fraction of 0.23 was 115 Hz at 0 mT, and increased to 134 Hz at 60 mT. The vibration transmissibility was independent of the magnetic field. A linear relation between the natural frequency and (G/m) 1/2 was observed (G: storage modulus, m: mass), indicating that the observed vibration is basically described by a simple harmonic oscillation.

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Section: Introductionmentioning

confidence: 99%

Magnetically Tunable Vibration Transmissibility for Polyurethane Magnetic Elastomers

et al. 2018

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“… F PSA ( t ) and F MRE ( t ) are the active actuation force of PSA and the semi-active actuation force of MRE isolator generated by the electromagnetic field, respectively, which will also be computed by the designed FSC in the following section. The equivalent stiffness and damping coefficient of PSA and MRE isolator are obtained from experimental test results in Fu et al (2014) and Fu et al (2016), which are listed in Table 2.…”

Section: Modeling Of Hybrid Isolation Systemmentioning

confidence: 99%

“…For the PAS used in this article which is linear under the operating frequency range of 50 Hz by experimental test (Fu et al, 2014), the switch frequency of active and semi-active control is set as 50 Hz. On the other hand, in order to obtain the switch frequency of semi-active control and passive control, the simulations are carried out.…”

Section: Fsc Designmentioning

confidence: 99%

Active/semi-active hybrid isolation system with fuzzy switching controller

Liao

et al. 2017

Journal of Intelligent Material Systems and Structures

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This article designs an active/semi-active hybrid isolator using magnetorheological elastomer isolator and piezoelectric stack actuator to suppress the wide-frequency vibration in precision platform, which can be switched to active isolator, semi-active one, and passive one according to the spectrum signature of the excitation. First, the structure of the hybrid isolator is introduced. Then, the dynamic model of the hybrid isolation system is established, the model parameters are identified, and the switching condition for the hybrid isolator is derived by experiments. Next, considering variable amplitude and frequency vibration of the isolated system, an active and semi-active fuzzy switch controller is designed for piezoelectric stack actuator and magnetorheological elastomer hybrid isolator, which are independent of the system model, self-tuning, and robust. Finally, the numerical simulations are conducted under variable frequency excitations to evaluate the performance of the designed fuzzy switch controller, and the results show that the hybrid isolator, combined with the fuzzy switch controller, can attenuate full frequency vibration effectively.

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“…Fu et al. 18 developed a semi-active/fully active hybrid isolator by using magnetorheological elastomer and piezoelectric material, which can suppresses full frequency vibration. Han et al.…”

Section: Introductionmentioning

confidence: 99%

“…Hong and Choi 17 developed a mixed-mode-type magnetorheological fluid mount and passive rubber mounts, which can effectively reduce the unwanted vibration levels such as acceleration of structural system and force transmission. Fu et al 18 developed a semi-active/fully active hybrid isolator by using magnetorheological elastomer and piezoelectric material, which can suppresses full frequency vibration. Han et al 19 developed a hybrid mount featuring a passive rubber, magnetorheological fluid and a piezostack.…”

Section: Introductionmentioning

confidence: 99%

A hybrid vibration isolator: Design, control, and experiments

Zhang

Chen

Jiao

2016

Proceedings of the Institution of Mechanical Engineers, Part C:

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A hybrid vibration isolator (HVI) is presented with its structure, dynamic model, control strategy and preliminary experiments. The HVI is composed of the active piezostack actuator and the passive rubber isolator, which has compact structure and high reliability. Based on the dynamic model and the formula derivation of the transmissibility, the control algorithm is established using the linear quadratic regulator method. The simulations indicate that the vibrations acting on the load platform are vastly reduced, where the active piezostack-based actuator can eliminate the resonance peak significantly. Moreover, the passive rubber-based isolator is effective to isolate a part of vibration once active control fails. Finally, an experimental system is built up to implement integrated passive and active vibration control using the HVI prototype. The experimental results verify the theoretical analysis work.

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Research on Hybrid Isolation System for Micro-Nano-Fabrication Platform

Cited by 16 publications

References 22 publications

Magnetically Tunable Vibration Transmissibility for Polyurethane Magnetic Elastomers

Magnetically Tunable Vibration Transmissibility for Polyurethane Magnetic Elastomers

Active/semi-active hybrid isolation system with fuzzy switching controller

A hybrid vibration isolator: Design, control, and experiments

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