Research on high precision and large range automatic focusing method for digital lithography
Yue Liu,
Ningning Luo,
Zhangrui Chen
et al.
Abstract:At present, the resolution of digital lithography based on digital micromirror devices is constantly improving. The assembly and debugging of traditional autofocusing devices are complicated, and the focus detection precision and range are difficult to meet the requirements of high precision digital lithography. Therefore, it has become an important research topic to explore the matching digital lithography autofocusing method. In this paper, a set of high resolution digital lithography system is established, … Show more
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