Research on correlation between metal oxide semiconductor target and magnetron sputtered film based on TFT application

Yang, Yuexin; Li, Yilin; Ning, Honglong; Lu, Kuankuan; Luo, Dongxiang; Fu, Xiao; Su, Guoping; Zhu, Zhennan; Yao, Rihui; Peng, Junbiao

doi:10.1016/j.jallcom.2024.173942

Journal of Alloys and Compounds

2024

DOI: 10.1016/j.jallcom.2024.173942

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Research on correlation between metal oxide semiconductor target and magnetron sputtered film based on TFT application

Yuexin Yang,

Yilin Li,

Honglong Ning

et al.

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Research on correlation between metal oxide semiconductor target and magnetron sputtered film based on TFT application

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References 46 publications

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