Abstract:This paper presents a multiparameter water quality sensor chip with temperature compensation. The sensor chip was manufactured using microelectromechanical system (MEMS) technology. The surface of the chip integrated pH, dissolved oxygen (DO), ammonia nitrogen, and temperature sensors. To compensate for the solution temperature, the chip was also designed with a sandwich, plate-type serpentine Pt resistance heater. The experimental results showed that the pH sensor had a high sensitivity of 0.288 mA/pH with go… Show more
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