2012
DOI: 10.3788/lop49.013101
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Research of Three-Wave-Band Filters Used in Free Space Communication System

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“…Before the coating process, the substrates were cleaned with acetone, and then by mixed liquid with 3:1 of anhydrous alcohol and anhydrous ether. When the vacuum degree got close to 4× 10 -3 , the ion source was applied for pre-cleaning of the substrates(last for 10 minutes),which can remove the second pollution, activate the surface of substrate, and form pretense diffusion layer at the surface of substrate, enhance the bonding force between the film and substrate, enhance the film stability of anti-laser damage [14][15] .…”
Section: Preparation Processmentioning
confidence: 99%
“…Before the coating process, the substrates were cleaned with acetone, and then by mixed liquid with 3:1 of anhydrous alcohol and anhydrous ether. When the vacuum degree got close to 4× 10 -3 , the ion source was applied for pre-cleaning of the substrates(last for 10 minutes),which can remove the second pollution, activate the surface of substrate, and form pretense diffusion layer at the surface of substrate, enhance the bonding force between the film and substrate, enhance the film stability of anti-laser damage [14][15] .…”
Section: Preparation Processmentioning
confidence: 99%