Research of subwavelength grating based on multilayer films structure

Abstract

Based on the theory of suface plasmon resonance and the special nano-optical effect of metal-dielectric composite, we study super-resolution photolithography using multilayer films. The main point is to use 365 nm exposal light to realize super-resolution imaging by using a mask with a period of 230 nm and linewidth of 100 nm. We discuss the selection of the parameters multi-film with equal thickness, and achieve a sufficient contrast and high intensity through numerical simulation, then verify the obtained results by the plasmon nanolithography technique. Choosing the best scheme, we achieve large-area super-resolution images with the subwavelength structure.

Measurement and analysis of the surface roughness of Ag film used in plasmonic lithography

“…[1] The strong confinement of light associated with surface plasmon (SP) resonances has stimulated the development of nanophotonic components such as waveguides, [2] switches, [3] sensors, [4] and metamaterials. [5][6][7] In the above applications, the films must usually be very thin and flat to achieve efficient coupling between the light and SP. However, the surface roughness remains an important factor in the design of nanooptical devices.…”

Ultra-elongated depth of focus of plasmonic lenses with concentric elliptical slits under Gaussian beam illumination

“…Characteristics of surface plasmon polariton (SPP)based nanophotonic devices are appealing to numerous researchers due to their extraordinary transmission in free space recently. [1][2][3][4][5][6][7][8] Lately, nanosandwich waveguide, [9] SPP-based superlens, [10] resonance immunosensors, [11] nanobiosensors, [12] and nanoprobes [13] were reported. Many functions can be realized using the reported SPP-based nanophotonic devices, such as superfocusing, detection, biosensing and collimating.…”

“…More recently, superfocusing especially the tight focusing in nanoscale confinement of SPP has been researched actively. Fu et al [5][6][7][8][9][10][11][12][13][14] demonstrated that a silver film coated on glass with some corrugations can play a role as a superlens. Many other researchers have found the similar results.…”