光学学报
 2010
DOI: 10.3788/aos20103011.3133
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Research of Optimization Design of Groove Diffraction Grating Profile Parameters

樊叔维 Fan Shuwei1,
周庆华 Zhou Qinghua2,
李红 Li Hong3
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“…grating, photonic crystal etc. [1,2,3]). Besides, it is also widely used in dimensional metrology of semiconductor chip (e.g.…”
Section: Introductionmentioning
confidence: 97%

Convergence improvement of the Fourier modal slice absorption method for crossed gratings

Deng
1
,
Chen
2
2015
Optik
1
0
0
0
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“…grating, photonic crystal etc. [1,2,3]). Besides, it is also widely used in dimensional metrology of semiconductor chip (e.g.…”
Section: Introductionmentioning
confidence: 97%

Convergence improvement of the Fourier modal slice absorption method for crossed gratings

Deng
1
,
Chen
2
2015
Optik
1
0
0
0
View full textAdd to dashboardCite
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