Research of anti-reflective and protective DLC Film on Si Substrate by Femto-second Pulsed Laser Deposition

Shuyun, 王淑云 Wang; Yanlong, 郭延龙 Guo; Xu, 刘旭 Liu; Haiyuan, 曹海源 Cao; Huisheng, 王会升 Wang; Yong, 程勇 Cheng

doi:10.3788/hplpb20102208.1705

Cited by 3 publications

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“…By using double cathode hollow cathode discharge, the working carrier gas of hydrocarbon is activated and dissociated to form a high density plasma, which has many efforts in deposit on diamond film or surface modification for the diamond film. The Xu-Tec can be employed as the metallization method of preparing W metallic coatings and Ta x C interlayer onto CVD diamond films [54] . In recent years, the application of Xu-Tec process in diamond has following three aspects:…”

Section: Application Of Double Glow Plasma Technology In Diamond Filmmentioning

confidence: 99%

Other Technologies by Double Glow Discharge Plasma Phenomenon

Xiong²

2017

Plasma Surface Metallurgy

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In order to break the limitation of plasma nitriding technology, which can be applied to a few non-metallic gaseous elements, the "Double Glow Discharge Phenomenon" was found and then invented the "Double Glow Plasma Surface Metallurgy Technology". This double glow plasma surface metallurgy technology can use any element in the periodic table of chemical elements for surface alloying of metal materials. Countless surface alloys with special physical and chemical properties have been produced on the surfaces of conductive materials.By using double glow discharge phenomenon, a series of new plasma technologies，such as the double glow plasma grapheme technology, double glow plasma brazing technology, double glow plasma sintering technology, double glow plasma nanotechnology, double glow plasma cleaning technology, double glow plasma carburizing without hydrogen and so on, have been invented.A very simple phenomenon of double glow discharge can generate about 10 plasma innovation technologies, which fully shows that there is still a lot of innovation space on the basis of classical physics. This paper briefly introduces the basic principles, functions and characteristics of each technology. The application prospects and development directions of plasma in metal materials and machinery manufacturing industry will also be discussed.

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Section: Application Of Double Glow Plasma Technology In Diamond Filmmentioning

confidence: 99%

Other Technologies by Double Glow Discharge Plasma Phenomenon

Xiong²

2017

Plasma Surface Metallurgy

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A series of plasma innovation technologies by the double glow discharge phenomenon

Xu,

Wu,

Huang

et al. 2023

AIP Advances

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In order to break the limitation of plasma nitriding technology, which can only be applied to a few non-metallic gaseous elements, the “double glow discharge phenomenon” was defined and then the “double glow plasma surface metallurgy technology” was invented. This double glow plasma surface metallurgy technology can use any element of the Periodic Table for surface alloying of metallic materials. Countless surface alloys with special physical and chemical properties have been produced on the surfaces of conductive materials. By using the double glow discharge phenomenon, a series of new double glow plasma technologies have been developed to apply to surface metallurgy, graphene technology, brazing, sintering, arc plasma surface alloying, nanotechnology, cleaning, carburizing without hydrogen, and so on. This article briefly introduces the basic principles, functions, and characteristics of each technology. The application prospects and development directions of plasma in metallic materials and the machinery manufacturing industry will also be discussed.

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Corrosion resistance of optical diamond-like carbon film

Wang

Liu

et al. 2020

IOP Conf. Ser.: Mater. Sci. Eng.

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KrF laser and Ti:Sapphire femto-second laser were used to deposit diamond-like carbon(DLC) films on silicon substrates which were double polished. Optical transmittance and corrosion resistance of these samples were compared. The transmittance of DLC film sample which was deposited by Ti:Sapphire laser in oxygen atmosphere was higher than the sample which was deposited by KrF laser in vacuum. Both samples could pass the salt solubility test and salt fog test. But when dipped in NaOH liquor, the result showed that surface of the sample deposited by Ti:Sapphire laser in oxygen atmosphere appeared corrosive spots first. Reasons were analyzed according to corrosive mechanism.

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Research of anti-reflective and protective DLC Film on Si Substrate by Femto-second Pulsed Laser Deposition

Cited by 3 publications

References 0 publications

Other Technologies by Double Glow Discharge Plasma Phenomenon

Other Technologies by Double Glow Discharge Plasma Phenomenon

A series of plasma innovation technologies by the double glow discharge phenomenon

Corrosion resistance of optical diamond-like carbon film

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