Reproducibility in r.f.‐GDOES depth profiling analysis of thin films

Abstract

The reproducibility in radiofrequency glow discharge optical emission spectroscopy (r.f.-GDOES) depth profiling has been examined using a 360 nm thick anodic alumina film with a chromium-containing delta-function layer. The time required to sputter through the film was constant, to within 1%, whereas the signal intensities of film species agreed to within 3%. This level of reproducibility together with high depth resolution makes the technique ideal for on-site quality control of various surface-enhanced industrial products, embracing electronics and protective surface treatments.

Radiofrequency GDOES: a powerful technique for depth profiling analysis of thin films

“…Plate 1(b) shows the depth profiles for aluminium and chromium, without any data manipulation, obtained from the five different areas of a single specimen. 7 Here, the sputtering time was converted directly to the depth, assuming that the sputtering rate was constant throughout the analysis of the oxide film. The profiles were recorded at an argon pressure of 680 Pa and a power of 40 W. Similar results were obtained for repeated measurements on other specimens anodized in a similar manner.…”

GD-OES and XPS coupling: A new way for the chemical profiling of photovoltaic absorbers

“…1. Reproducibility of the emission intensity profiles is not presented here but is about 1% RSD [27] for given abrasion conditions and similar samples. The shape of this profile can be divided into 4 main areas corresponding to the different sublayers of the materials.…”

Analysis of anodic films on Nb and NbNx by glow discharge optical emission spectroscopy

“…5. Comparison of profiles, which is possible due to the high reproducibility of GDOES, 11 reveals no significant changes due to annealing. The emission line of boron at 249.678 nm is close to that of niobium at 249.698 nm.…”

“…Boron species, incorporated into the film and present in the outer 15% of the film thickness, thus migrate outwards at ¾0.6 times the rate of Nb 5C ions. 11 Hydrogen species are also present in the outer part of the film Intensity/arb. unit Figure 5.…”