2020
DOI: 10.1166/sam.2020.3651
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Replication and Surface Treatment of Micro Pattern Generated by Entanglement of Nanowires

Abstract: In this study, a nano-micro pattern was fabricated by a nanoimprint lithography process using a porous material, particularly anodic aluminum oxide (AAO), and polymer resin. The fabricated mold consisted of a group of nanowires forming a bundle and showing a specific micro pattern. The structures were subjected to various surface treatments to control surface conditions and wettability. UV-Ozone treatment and octadecyltrichlorosilane (OTS) coating were used as surface treatments. Through these surface treatme… Show more

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“…Solid electrolyte gas sensors, electrochemical gas sensors, metal oxide semiconductor sensors (MOS), catalytic combustion gas sensors, and other types of gas sensors have been documented in the literature [14][15][16][17]. MOS type sensors are among the most researched of the many types of gas sensors because they may be used to detect a variety of gases at lower concentrations merely by studying the change in resistance induced by the interaction between the sensing material and the target gas [18][19][20][21]. The operating concept of a gas sensor is based on changes in the sensing material's electrical conductivity.…”
Section: Introductionmentioning
confidence: 99%
“…Solid electrolyte gas sensors, electrochemical gas sensors, metal oxide semiconductor sensors (MOS), catalytic combustion gas sensors, and other types of gas sensors have been documented in the literature [14][15][16][17]. MOS type sensors are among the most researched of the many types of gas sensors because they may be used to detect a variety of gases at lower concentrations merely by studying the change in resistance induced by the interaction between the sensing material and the target gas [18][19][20][21]. The operating concept of a gas sensor is based on changes in the sensing material's electrical conductivity.…”
Section: Introductionmentioning
confidence: 99%