Repetitive control applied to a walking piezo actuator

Merry, Rje Roel; Kessels, D. J.; Molengraft, René van de; Steinbuch, M Maarten

doi:10.1109/icca.2009.5410598

Cited by 5 publications

(1 citation statement)

References 17 publications

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“…Hysteresis can be modeled as Duhem [10], Prandtl-Ishlinskii [11] or Preisach [12] models and appropriate controllers are employed. Several control techniques are proposed to improve the tracking error such as fuzzy controller [13], repetitive controllers [14,15] or repetitive control augmented with non-linear PID controller [16]. Feedforward control with PID gain scheduling for walking PiezoLEGS motor [17] is presented in [18,19].…”

Section: Introductionmentioning

confidence: 99%

Nanometric positioning of a piezo walker

Zhakypov

Golubovic

Uzunović

et al. 2013

IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society

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This work presents functional description of a walking piezoelectric motor and its control in nanometer precision. For this purpose a dynamical model of the actuator is derived based on simple mass spring damper system. Model parameters are estimated from step response plot and the system is expressed with second order transfer function. Additional identification experiments verified the theoretical kinematics of the bimorph legs. These experiments demonstrate approximately linear relation between the legs displacement in x and y directions to the applied voltages. Based on derived system model and identification results a PI controller followed by Hadamard transformation is proposed as a controller scheme. Experimental results for staircase and sinusoidal references reveal precise positioning capabilities of the system with the proposed control scheme down to few nanometers.

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