Remarks concerning about the characteristics of the extractor vacuum gauge and the Quadrupole Mass Spectrometer

Elkatmis, Alper; Kangi, Rifat

doi:10.1016/j.measurement.2018.08.043

Cited by 6 publications

(4 citation statements)

References 10 publications

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“…Finally, the mean sensitivity values of non-sensitive to pressure ranges and the sensitivity factors relative to N 2 are computed and summarized in table 3. The relative sensitivities are compared with the values of previous studies [15,22], and the findings have a similar tendency to that observed in previous reports.…”

Section: Qms Sensitivity Calibrationsupporting

confidence: 80%

“…As one of the core components of the dynamic expansion system, the conductance elements include small tube 29 and circular orifice 34. The small tube 29 was made by laser drilling of stainless steel SUS316L, which was also melted in a vacuum to reduce its hydrogen content and has good thermal and mechanical stability under one-atmosphere pressure [15]. To minimize the pressure gradients within the calibration chamber, the diameter of orifice 34 is designed to be 11 mm.…”

Section: Dynamic Expansion Systemmentioning

confidence: 99%

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A UHV standard with option to be used as partial pressure standard

Dong

Sun

et al. 2020

Metrologia

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Partial pressure measurement has become indispensable for many applications and contributes to the complete characterization of a vacuum system. In this work, an ultrahigh vacuum (UHV) standard was established for calibrating partial pressure analyzers as a partial pressure standard, and a new method was introduced to generate standard partial pressures, which was named 'the dynamic expansion method based on static expansion vacuum standard injection mode'. The method can produce standard partial pressures in the range from 10 -5 Pa to 10 -10 Pa. The relative standard uncertainty budgets of generated partial pressures (k = 1) were in the range from 2.8% up to 5.0% from 10 -5 Pa to 10 -9 Pa for nitrogen. Employing this method, the sensitivity calibrations of quadrupole mass spectrometry (QMS) were performed in the partial pressure range of 8.62 × 10 −5 Pa to 1.51 × 10 −10 Pa with single inert He, Ar, and Kr gas in secondary electron multiplier (SEM) mode. Similarly, the calibrations were carried out using active gases (H 2 , CH 4 , N 2 , O 2 , and CO 2 ) in the range 8.56 × 10 −5 Pa to 1.50 × 10 −9 Pa. Additionally, the SEM gains were calibrated for these high-purity gases, on the basis of SEM gain coefficients. QMS sensitivities equivalent to Faraday cup mode were attained, and it was found that the results were approximately consistent with those of previous studies. The data were also in agreement with our theoretical calculation values excluding CH 4 .

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Section: Qms Sensitivity Calibrationsupporting

confidence: 80%

Section: Dynamic Expansion Systemmentioning

confidence: 99%

A UHV standard with option to be used as partial pressure standard

Dong

Sun

et al. 2020

Metrologia

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“…The thermionic electron sources operating in the Schottky current range used in gas ion sources generate an ionizing electron beam with a specific intensity and energy. They are widely used in many measuring tools, such as apparatus for ionization cross-section measurements [ 1 , 2 , 3 ], ionization gauges [ 4 , 5 ], mass spectrometers, and in microelectromechanical systems (MEMS) technology [ 6 , 7 ]. Electron beam ion source technology has been applied in the Relativistic Heavy Ion Collider at Brookhaven National Laboratory [ 8 ].…”

Section: Introductionmentioning

confidence: 99%

“…However, as the ratio of the ion current over the electron beam current is measured, the need for electron beam current stabilization can be eliminated, for example, in cross-section measurements [ 1 , 2 , 3 ]. In ionization gauges and mass spectrometers, for the high stability of sensitivity and repeatability of measurement results [ 4 , 5 ], the electron beam current and accelerating voltage should be maintained at preset constant values, and, therefore, both quantities must be perfectly stabilized, which complies with the concept of the cognitive process in metrology [ 10 ]. It should be noted that, in some instruments, such as mass spectrometers, the Klopfer ionization gauge [ 5 ], only a part of the electron beam current collected by a trap electrode, as a true ionizing current, should be stabilized [ 11 ].…”

Section: Introductionmentioning

confidence: 99%

Thermionic Electron Beam Current and Accelerating Voltage Controller for Gas Ion Sources

Sikora

Kania

Mroczka

2021

Sensors

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Thermionic emission sources are key components of electron impact gas ion sources used in measuring instruments, such as mass spectrometers, ionization gauges, and apparatus for ionization cross-section measurements. The repeatability of the measurements taken with such instruments depends on the stability of the ion current, which is a function, among other things, of the electron beam current and electron accelerating voltage. In this paper, a laboratory thermionic electron beam current and accelerating voltage controller is presented, based on digital algorithm implementation. The average value of the percentage standard deviation of the emission current is 0.021%, and the maximum electron accelerating voltage change versus the emission current is smaller than 0.011% in the full operating range of the emission current. Its application as a trap current or emission current-regulated ion source power supply could be useful in many measuring instruments, such as in microelectromechanical system (MEMS) mass spectrometers as universal gas sensors, where a stable emission current and electron energy are needed.

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Residual gas analysis in vacuum insulation panel (VIP) with glass fiber core and investigation of getter for VIP

Xie²,

Chen³

et al. 2020

Building and Environment

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Remarks concerning about the characteristics of the extractor vacuum gauge and the Quadrupole Mass Spectrometer

Cited by 6 publications

References 10 publications

A UHV standard with option to be used as partial pressure standard

A UHV standard with option to be used as partial pressure standard

Thermionic Electron Beam Current and Accelerating Voltage Controller for Gas Ion Sources

Residual gas analysis in vacuum insulation panel (VIP) with glass fiber core and investigation of getter for VIP

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