2023
DOI: 10.1088/1361-6587/acb3f9
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Reliable measurements of low-density plasmas using a novel Langmuir probe with a guard tube

Abstract: A novel cylindrical Langmuir probe with an optimized probe structure and an additional guard tube is developed to obtain exact plasma electron densities. Using both this novel Langmuir probe and a conventional cylindrical Langmuir probe, a comparative measurement of low-density hot-filament discharge plasmas is performed. Although the plasma potentials and electron temperatures determined by the two probes are almost identical, the electron densities obtained using the conventional Langmuir probe are grossly u… Show more

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Cited by 2 publications
(1 citation statement)
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“…Non-thermal plasmas have highly energetic electrons and a much higher temperature than neutral ions and atoms [20,21]. Low-density plasmas have a reduced number of particles and allow the formation of complex structures [22,23]. High-density plasmas have many charged particles and can have complex behaviors [24,25].…”
Section: Introductionmentioning
confidence: 99%
“…Non-thermal plasmas have highly energetic electrons and a much higher temperature than neutral ions and atoms [20,21]. Low-density plasmas have a reduced number of particles and allow the formation of complex structures [22,23]. High-density plasmas have many charged particles and can have complex behaviors [24,25].…”
Section: Introductionmentioning
confidence: 99%