Reliability study on bst capacitors for gaas mmic

Electrical Conductivity of Epitaxial SrTiO3 Thin Films as a Function of Oxygen Partial Pressure and Temperature

“…6), yielding a value of E G ðTÞ ¼ ð3:30 AE 0:17ÞeV À ð5 AE 1Þ Â 10 À4 eV T=K (10) agreeing very well with the result by Moos (E G (T) 5 3.25 eV-5.85 Â 10 À4 eV Á T/K). 6), yielding a value of E G ðTÞ ¼ ð3:30 AE 0:17ÞeV À ð5 AE 1Þ Â 10 À4 eV T=K (10) agreeing very well with the result by Moos (E G (T) 5 3.25 eV-5.85 Â 10 À4 eV Á T/K).…”

“…A quantitative analysis of the data reveals several parameters: first, the bandgap energy E G , which is calculated from the Arrhenius plot of the conductivity values in the intrinsic minimum ( Fig. 6), yielding a value of E G ðTÞ ¼ ð3:30 AE 0:17ÞeV À ð5 AE 1Þ Â 10 À4 eV T=K (10) agreeing very well with the result by Moos (E G (T) 5 3.25 eV-5.85 Â 10 À4 eV Á T/K). 21 Second, the thermal activation of oxygen vacancy diffusion E A,Vö ,…”

“…[1][2][3] The most promising and widely investigated material systems are perovskite titanates, especially in the form of thin film. 9 Perovskite titanate thin films are also used in mobile communication systems like decoupling capacitors in monolithic microwave integrated circuits (MMICs) 10 or tunable devices, 11 and they can be found in microelectromechanical devices (MEMs). 9 Perovskite titanate thin films are also used in mobile communication systems like decoupling capacitors in monolithic microwave integrated circuits (MMICs) 10 or tunable devices, 11 and they can be found in microelectromechanical devices (MEMs).…”

“…The current research comprises the integration of high-k thin films in dynamic random access memories (DRAMs), 4,5 the replacement of silicon oxide as the gate dielectric in field effect transistors (FETs), 6 the development and integration of ferroelectric thin films into new functional devices like non-volatile memories (FeRAMs), 7,8 or ferroelectric field effect transistors (FeFETs). 9 Perovskite titanate thin films are also used in mobile communication systems like decoupling capacitors in monolithic microwave integrated circuits (MMICs) 10 or tunable devices, 11 and they can be found in microelectromechanical devices (MEMs). 12 Another area of the utilization of perovskite titanate thin films is sensors.…”

Leakage and Reliability Characteristics of Lead Zirconate Titanate Thin‐Film Capacitors

“…1 For other applications, the benefit of thin-film capacitor technology may be based on the ability either to provide integrated capacitor networks and RCL circuits or to integrate them into the packaging architecture, rather than direct integration with the integrated circuit (IC). For these applications, the main motivation for developing a thin-film technology is that it can lead to a higher level of integration than can be achieved with discrete components.…”