Reliability study of a MEMS array under varying temperature and humidity conditions

Sivakumar, G.; Ranganathan, Ranjith; Gale, Richard; Dallas, Tim

doi:10.1117/12.842384

Cited by 1 publication

(1 citation statement)

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“…The vibration is asserted to the device through a hole on the bottom of the environmental chamber, which creates inhomogeneity of temperature distribution within the chamber. Sivakumar et al characterized the accrual rate of stiction and mechanical fatigue in a MEMS micromirror device within a temperature and humidity range of 25 • C to 90 • C and 20% to 80% RH, respectively [5]. Lin et al studied the RF MEMS switches performance and reliability under different temperatures [6].…”

Section: Introductionmentioning

confidence: 99%

A Microtester for Measuring the Reliability of Microdevices in Controlled Environmental Conditions

Dou

Zhou

et al. 2021

Micromachines

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A miniaturized reliability test system for microdevices with controlled environmental parameters is presented. The system is capable of measuring key electrical parameters of the microdevices while controlling the environmental conditions around the microdevices. The test system is compact and thus can be integrated with standard test equipment for microdevices. By using a feed-forward decoupling algorithm, the presented test system is capable of generating a temperature range of 0–120 °C and a humidity range of 20–90% RH (0–55 °C), within a small footprint and weight. The accuracy for temperature and humidity control is ±0.1 °C and ±1% RH (30 °C), respectively. The functionality of the proposed test system is verified by integrating it with a piezo shaker to test the environmental reliability of an electromagnetic vibration energy harvester. The proposed system can be used as a proof-of-technology platform for characterizing the performance of microdevices with controlled environmental parameters.

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Section: Introductionmentioning

confidence: 99%