Reliability Performances of BST Capacitors for Impedance Tuning Applications

Bouyssou, E.; Diatta, Marianne; Trupkovic, Alexandra; Gardes, P.; Forster, Stéphane; Charley, Sylvain

doi:10.1149/06106.0155ecst

Cited by 2 publications

(1 citation statement)

References 8 publications

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“…The reliability parameters of the dielectrics are evaluated for both substrates through a Constant Voltage Stress (CVS) tests perform at a 200 °C temperature and an electrical field stress of 1250 kV/cm on about 30 capacitors. This methodology is useful for the dielectric reliability evaluation [17].…”

Section: = ɛ ɛmentioning

confidence: 99%

Thermo-mechanical simulation to optimize the integration of a BST stacked MIMIM capacitor

Gardes

Roqueta

Diatta

et al. 2016

2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and

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For the last decade, paraelectric BaxSr1-xTiO3 (BST) thin films have been especially studied to fabricate MIM capacitor for capacitance tuning applications. This paper describes the mechanisms of cracks apparition under BST stacked MIMIM capacitors (Metal Insulator Metal Insulator Metal) built on silicon substrate. The methodology used in this study to have a further understanding of this phenomenon is to investigate 2D process simulations, based on an elastic model. Hence, it could be evidenced that the gap between the extreme stress levels induced by an annealing performed at the end of the capacitor manufacturing is the main contributor in the crack formation. Then, the change from silicon to a sapphire substrate was implemented to avoid cracks in the real process integration. Finally, the capacitor devices could be tested and were demonstrated to exhibit better electrical specifications.

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Section: = ɛ ɛmentioning

confidence: 99%

Thermo-mechanical simulation to optimize the integration of a BST stacked MIMIM capacitor

Gardes

Roqueta

Diatta

et al. 2016

2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and

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Electrical properties of integrated capacitors made of BST and BCTZ material for impedance adaptation applications

Gardes

Diatta

Proust

et al. 2021

Journal of Applied Physics

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Tunable materials, which exhibit in same time, a non-linear variation of their dielectric permittivity (ɛr) under an external electric field and low dielectric losses, are widely used in electronics for tunable applications. Single capacitors and a network of capacitors and resistors have been manufactured for an exhaustive electric characterization of three paraelectric materials. The first one is a Ba0.55Sr0.45TiO3 (BST) thin film prepared by RF sputtering technique. The second one is a film of Ba0.7Sr0.3TiO3 doped with Cu0.5%Mn1% prepared by using sol-gel processing technique. The third one is a Ba0.94Ca0.06Ti0.84Zr0.16O3 (BCTZ) thin film prepared by sol-gel technique. The first electrical parameter extracted is the breakdown voltage of the capacitors to define the maximum electric field applicable for the following characterizations. These three films have a high relative permittivity, up to 680 for the BST sputtered, 870 for the BST sol-gel, and 570 for the BCTZ sol-gel. They are also characterized by a very high dielectric tunability with 6.7:1 for the BST sputtered, 9.3:1 for the BST sol-gel and 7.6:1 for the BCTZ sol-gel. The quality factor of these paraelectric films is measured at 150 for the BST sputtered, 140 for the BST sol-gel, and 45 for the BCTZ sol-gel. These very high electrical properties are obtained with no compromise on the capacitor lifetime. In conclusion, these three paraelectric films could be used and the choice of either films is driven by which parameters would be the most important in the targeted tunable application.

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Reliability Performances of BST Capacitors for Impedance Tuning Applications

Cited by 2 publications

References 8 publications

Thermo-mechanical simulation to optimize the integration of a BST stacked MIMIM capacitor

Thermo-mechanical simulation to optimize the integration of a BST stacked MIMIM capacitor

Electrical properties of integrated capacitors made of BST and BCTZ material for impedance adaptation applications

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