“…The accelerometer sensor illustrated in Fig. 9 possesses a significant area aspect ratio and triggers delamination as a result of high thermomechanical stresses during the soldering process [ 2 ]. Fig.…”
Section: Mems Reliability With Consideration Of Temperaturementioning
confidence: 99%
“…Micro-electro-mechanical systems (MEMS) are designed to achieve specific sensor or actuator functions and are integrated systems fabricated on a microscale [ 1 , 2 ]. Nowadays, MEMS technology has become extensively used in the civil and military sectors, with inertial measurement being among the most vital application areas.…”
“…The accelerometer sensor illustrated in Fig. 9 possesses a significant area aspect ratio and triggers delamination as a result of high thermomechanical stresses during the soldering process [ 2 ]. Fig.…”
Section: Mems Reliability With Consideration Of Temperaturementioning
confidence: 99%
“…Micro-electro-mechanical systems (MEMS) are designed to achieve specific sensor or actuator functions and are integrated systems fabricated on a microscale [ 1 , 2 ]. Nowadays, MEMS technology has become extensively used in the civil and military sectors, with inertial measurement being among the most vital application areas.…”
“…By evaluating reliability and according to [110], different failure occurrences in sensors are possible based on exposure to several materials. Being a modern transportation solution, the reliability of the hyperloop is affected by sensor quality.…”
Recently, major climate events highlighted the increasing need to use sustainable technologies in the transportation domain. Energy production infrastructure, storage, and propulsion systems still rely on non-sustainable technology for economic growth. Therefore, this study reviews the modern transportation propulsion systems and transportation infrastructure components, describing the possible outcomes for several future directions based on prototypes and study advances. The in-production vehicles were reviewed for providing immediate, robust, and renewable solutions for the existing non-sustainable transportation infrastructure. The study continues with extended-capability vehicles and their limitations and vulnerability based on the current infrastructural circumstances. An alternative energy transfer infrastructure has been concluded to possibly provide the necessary capabilities to approach a neutral carbon footprint and mitigate ongoing climate adverse events. The hypothetical prototype uses distance energy transfer to bypass the described environmental constraints and provide a direction for achieving a possibly sustainable and economically evolving infrastructure.
“…Microelectromechanical system (MEMS) devices have been used in aerospace [ 1 ], biomedical [ 2 ], automotive [ 3 ], communications [ 4 ], as well as other high-tech fields [ 5 , 6 ], many of which use Ge as a substrate [ 7 , 8 , 9 ]. Getter films have attracted significant attention for their sorption performance in maintaining and improving the vacuum degree in MEMS vacuum devices for extended periods [ 10 , 11 , 12 , 13 ].…”
Improving the vacuum degree inside the vacuum device is vital to the performance and lifespan of the vacuum device. The influence of the Ti and ZrCoCe barrier layers on the performance of ZrCoCe getter films, including sorption performance, anti-vibration performance, and binding force between the ZrCoCe getter film and the Ge substrate were investigated. In this study, the Ti and ZrCoCe barrier layers were deposited between the ZrCoCe getter films and Ge substrates. The microtopographies of barrier layers and the ZrCoCe getter film were analyzed using scanning electron microscopes. The sorption performance was evaluated using the constant-pressure method. The surface roughness of the barrier layers and the getter films was analyzed via atomic force microscopy. The binding force was measured using a nanoscratch tester. The anti-vibration performance was examined using a vibration test bench. The characterization results revealed that the Ti barrier layer significantly improved the sorption performance of the ZrCoCe getter film. When the barrier material was changed from ZrCoCe to Ti, the initial sorption speed of the ZrCoCe getter film increased from 141 to 176 cm3·s−1·cm−2, and the sorption quantity increased from 223 to 289 Pa·cm3·cm−2 in 2 h. The binding force between the Ge substrate and the ZrCoCe getter film with the Ti barrier layer was 171 mN, whereas that with the ZrCoCe barrier layer was 154 mN. The results showed that the Ti barrier layer significantly enhanced the sorption performance and binding force between the ZrCoCe getter film and the Ge substrate, which improved the internal vacuum level and the stability of the microelectromechanical system vacuum devices.
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