2011
DOI: 10.1109/jlt.2011.2150198
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Relaxed Dimensional Tolerance Whispering Gallery Microbends

Abstract: Abstract-A new class of highly compact photonic microbend exploiting whispering gallery propagation is analyzed. Critical design dimensions are relaxed by using multimode waveguiding. A small outer sidewall radius enables tight arbitrary angle of rotation for the guided light, and the inner radius is reduced beyond the caustic radius to minimize the impact of the microbend dimensions on losses. Whispering gallery operation is compared with single-mode microbend operation using a combination of full-vectorial w… Show more

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Cited by 17 publications
(9 citation statements)
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References 35 publications
(28 reference statements)
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“…Critical dimension variations may be expected to become increasingly important with circuit scaling. Potentially important advances include the use of whispering gallery regimen waveguiding for reproducible, low-radius microbends 67 , precision-fabricated, low-loss de/multiplexers, low-reflection splitters, and manufacturable polarisation controllers 68 . Deep-UV lithography can enable both tighter dimensional control and also lower loss, lower crosstalk de/ multiplexer components that will be important for wavelengthselective architectures.…”
Section: Discussionmentioning
confidence: 99%
“…Critical dimension variations may be expected to become increasingly important with circuit scaling. Potentially important advances include the use of whispering gallery regimen waveguiding for reproducible, low-radius microbends 67 , precision-fabricated, low-loss de/multiplexers, low-reflection splitters, and manufacturable polarisation controllers 68 . Deep-UV lithography can enable both tighter dimensional control and also lower loss, lower crosstalk de/ multiplexer components that will be important for wavelengthselective architectures.…”
Section: Discussionmentioning
confidence: 99%
“…Microbend waveguide width variations of 100 nm lead to loss variations of only 0.01 dB in the whispering gallery regime [28]. Losses of only 0.2 dB/180°have been estimated from fabricated circuits and simulations alike [27,28]. By controlling the sidewall verticality, polarization conversion of down to −25 dB∕180°is predicted [28].…”
Section: Microbendsmentioning
confidence: 98%
“…Simulations show that bend radii of down to even a few micrometers may be feasible. Microbend waveguide width variations of 100 nm lead to loss variations of only 0.01 dB in the whispering gallery regime [28]. Losses of only 0.2 dB/180°have been estimated from fabricated circuits and simulations alike [27,28].…”
Section: Microbendsmentioning
confidence: 99%
“…Figure 2 shows a schematic cross-section for the waveguide types in the processed wafer, highlighting the depth of the etches relative to the light green optical confinement layers. The deepest etches are used for the low-radius 20 µm microbends [47]. Deep-etched, high side-wall verticality, 1.5 µm-wide waveguides are used for moderate-radius 100 µm curved-waveguides, the power splitters and the arrayed waveguides in the cyclic routers.…”
Section: Monolithic Switch Matrix Fabricationmentioning
confidence: 99%