2000
DOI: 10.1063/1.1287409
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Relation between gas phase CN radical distributions, nitrogen incorporation, and growth rate in flame deposition of diamond

Abstract: Influence of nitrogen on diamond growth in oxyacetylene combustion chemical vapor deposition J. Appl. Phys. 92, 4095 (2002); 10.1063/1.1502925 Spatial distributions of atomic hydrogen and C 2 in an oxyacetylene flame in relation to diamond growth Radical density measurements in an oxyacetylene torch diamond growth flame Controlled amounts of nitrogen were added during oxyacetylene flame deposition of diamond to investigate the possible role of the CN radical in the effects of nitrogen addition. CN radical dist… Show more

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Cited by 8 publications
(14 citation statements)
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“…We may therefore conclude that nitrogen-containing species near the center of the substrate originate from di-nitrogen in the feed gas that has reacted at the flame front. This is in agreement with findings by Stolk and co-workers, 58 who report that deposition in the central region is dominated by nitrogen in the feed.…”
Section: B Two-dimensional Flame Simulationssupporting
confidence: 83%
“…We may therefore conclude that nitrogen-containing species near the center of the substrate originate from di-nitrogen in the feed gas that has reacted at the flame front. This is in agreement with findings by Stolk and co-workers, 58 who report that deposition in the central region is dominated by nitrogen in the feed.…”
Section: B Two-dimensional Flame Simulationssupporting
confidence: 83%
“…Another effect of nitrogen addition is an enhancement of the growth rate. 11,14,15 In an annulus of enhanced growth and roughness typical for flame-grown samples, 13,16 which has a morphology different from that in the center, a relatively large amount of nitrogen is incorporated. By use of techniques such as secondary ion mass spectrometry, 9 photoluminescence ͑PL͒, 10 cathodoluminescence ͑CL͒, 5,11 and elastic recoil detection, 12 it has been shown that nitrogen is incorporated into the diamond crystal lattice of layers that have been deposited with nitrogen addition.…”
Section: Influence Of Nitrogen Addition On Oxyacetylene Flame Chemicamentioning
confidence: 99%
“…A very useful deposition technique for obtaining insight into the mechanisms of nitrogen influence on diamond CVD is oxyacetylene flame deposition in open air. From the list of possible candidates most information with respect to diamond growth is reported on CN 14,15,[17][18][19][20][21][22][23][24] and HCN. 13 As a consequence, the gas phase from which diamond is grown is not homogeneous in radial direction.…”
Section: Influence Of Nitrogen Addition On Oxyacetylene Flame Chemicamentioning
confidence: 99%
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