Regulating the coefficient of thermal expansion in electrodeposited Invar alloy films for fine metal masks via vacuum and hydrogen annealing

Ren, Wei; Yu, Yu; Lan, Xi; Guo, Lei; Guo, Zhancheng

doi:10.1007/s10853-024-10193-7

J Mater Sci

2024

DOI: 10.1007/s10853-024-10193-7

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Regulating the coefficient of thermal expansion in electrodeposited Invar alloy films for fine metal masks via vacuum and hydrogen annealing

Wei Ren,

Yu Yu,

Xi Lan

et al.

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Regulating the coefficient of thermal expansion in electrodeposited Invar alloy films for fine metal masks via vacuum and hydrogen annealing

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References 39 publications

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