Regulating Effect of Substrate Temperature on Sputtering-grown Ge/Si QDs under Low Ge Deposition

Shu, Qijiang; Yang, Linjing; Liu, Hongxing; Huang, Pengru

doi:10.1007/s11595-024-2950-2

J. Wuhan Univ. Technol.-Mat. Sci. Edit.

2024

DOI: 10.1007/s11595-024-2950-2

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Regulating Effect of Substrate Temperature on Sputtering-grown Ge/Si QDs under Low Ge Deposition

Qijiang Shu,

Linjing Yang,

Hongxing Liu

et al.

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Regulating Effect of Substrate Temperature on Sputtering-grown Ge/Si QDs under Low Ge Deposition

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References 21 publications

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