“…The contents of the four elements are close to the initial design composition. Accordingly, the density of the thin film can be calculated via the rules of mixtures, 5.67 g cm −3 , which presents the lower density among reported similar HEAs composition, as shown in Figure 2 b, including NbTiV 2 Zr [ 26 ], NbTiVZr [ 26 ], CrNbTiVZr [ 26 ], CrNbTiZr [ 26 ], AlMo 0.5 NbTa 0.5 TiVZr [ 27 ], Al 0.3 NbTa 0.8 Ti 1.4 V 0.2 Zr 1.3 [ 27 ], Al 0.4 Hf 0.6 NbTaTiVZr [ 27 ], CrMoNbWV [ 28 ], and WNbMoTaV HEAs [ 28 ]. To study the mechanical properties of the AlTiVNb HEA film, the load–depth curves derived from the nanoindentation are shown in Figure 2 c and the modulus and hardness of the film are presented in Figure 2 d. The curves show high repeatability, illustrating that the film is dense and uniform.…”