2001
DOI: 10.1016/s0169-4332(01)00546-3
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Refractive index profiles of MeV phosphor ion implanted planar waveguide in KTP

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Cited by 9 publications
(4 citation statements)
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“…Since the 1980s, waveguides in KTP have been fabricated by ion implantation with many different ion species, including light ions such as H [8], He [9][10][11][12][13][14][15], and the heavy or medium ions such as Ni [16], P [17], Li [14,18], Si [19], C [20], etc. Although waveguide phenomena have been observed and measured in these experiments, little work had been done for investigating the mechanism of waveguide formation.…”
Section: Introductionmentioning
confidence: 99%
“…Since the 1980s, waveguides in KTP have been fabricated by ion implantation with many different ion species, including light ions such as H [8], He [9][10][11][12][13][14][15], and the heavy or medium ions such as Ni [16], P [17], Li [14,18], Si [19], C [20], etc. Although waveguide phenomena have been observed and measured in these experiments, little work had been done for investigating the mechanism of waveguide formation.…”
Section: Introductionmentioning
confidence: 99%
“…At present, waveguides in KTP have been fabricated by both the light ions such as H [8], He [9][10][11][12][13][14][15][16] and the heavy or medium ions such as Ni [17], P [18], Li [15,19], Si [20], or C [21], etc.…”
Section: Introductionmentioning
confidence: 99%
“…Several experimental results [9,14,[16][17][18][19][20] have shown that the surface refractive index n x and n z in guide region can be increased and waveguide quality can be improved after suitable annealing treatment. In this paper, we will report the KTP crystal implanted by 150KeV He + ions with 8×10 16 ions/cm 2 , and analyze the refractive index profiles in the crystal after a set of thermal annealing under suitable conditions.…”
Section: Introductionmentioning
confidence: 99%
“…Ion implantation is an effective method to modulate the refractive index profile of the waveguide by controlling the condition of ion implantation, especially forming the mono-mode waveguide with a rectangular refractive index distribution, which is very important to improve the properties of waveguide devices. Waveguides in KTP have been fabricated by the implantation of H, He, Li and P ions [6][7][8][9].…”
Section: Introductionmentioning
confidence: 99%