Reflectometers for Absolute and Relative Reflectance Measurements in the Mid-IR Region at Vacuum

Gene, Jinhwa; Jeon, Min Yong; Lim, Sun Do

doi:10.3390/s21041169

Cited by 3 publications

(2 citation statements)

References 29 publications

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“…Optical reflectance measurement has a wide range of applications, including studying the optical adsorption of polymers, investigating the optical properties of surface coatings, and analyzing the optical characteristics of biological tissues [1][2][3][4]. For diverse needs, different instruments, such as an integrating sphere reflectometer, laser polarimeter, and glossmeter, have been used to measure the reflectance [5][6][7][8]. Surface reflectance can be significantly influenced by microroughness, microstructures, and complex materials [9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Real-Time Reflectance Measurement Using an Astigmatic Optical Profilometer

Liao

Huang

Syu-Gu

et al. 2022

Sensors

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An astigmatic optical profilometer with a commercial optical pickup head provides benefits, such as high resolution, compact size, and low cost. To eliminate artifacts caused by complex materials with different reflectances, a z-axis modulation mode is proposed to obtain quantitative surface morphology by measuring S curves on all image pixels. Moreover, the slope of the linear region in the S curve shows a positive relationship with the surface reflectance. However, the slope was calculated using an offline curve fitting method, which did not allow real-time reflectance imaging. Furthermore, quantitative reflectance data were unavailable because of the lack of calibration. In this study, we propose a novel method for real-time reflectance imaging by measuring the amplitude of a focus error signal (FES). The calibration results displayed a linear relationship between the FES amplitude and reflectance. The reflectance image of a grating sample with chrome patterns on a glass substrate demonstrates accurate reflectance measurements with a micrometer spatial resolution.

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Section: Introductionmentioning

confidence: 99%

Real-Time Reflectance Measurement Using an Astigmatic Optical Profilometer

Liao

Huang

Syu-Gu

et al. 2022

Sensors

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“…containing an absolute reflectometer and a relative reflectometer. The light source is a silicon carbon rod [10] . Among the above-mentioned works, only the National Institute of Standards and Technology used the laser as light source, and corrected the power drift of the laser by evaluating the laser stability.…”

mentioning

confidence: 99%

Spectral radiation drift behavior of near-infrared laser by the complete hemispherical reflection method

Huan

Zhao³

et al. 2023

AOPC 2022: Infrared Devices and Infrared Technology; And Terahertz Technology and Applications

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In the experiment of measuring the emissivity distribution characteristics by integrating sphere reflection method, the laser output power stability is an important guarantee for the accurate emissivity measurement. However, there is a lack of research on the influence of laser power stability on measurement results. Therefore, a measurement system for the infrared radiation source emissivity distribution characteristics is designed and built based on the complete hemispherical laser integrated reflection scheme in this paper. The stability of the laser light source subsystem is evaluated, and the laser power drift is corrected by means of a alternating measurement sequence. The experiment of measuring the flat plate radiation source emissivity distribution characteristics is carried out with a laser power of 3 W. The results show that the laser power shows a periodic drift and one period is about 70 s. The macroscopic power of the laser increases linearly throughout the measurement process. After correcting the laser power drift, the relative standard deviation of the flat plate radiation source is 0.56%, and the volatility is 2.99%. After drift correction, the measurement accuracy is improved by 28.2%.

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Ellipsoidal Reflectors for Biological Media Light Scattering Photometry

Bezuglyi

2023

Studies in Systems, Decision and Control

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Reflectometers for Absolute and Relative Reflectance Measurements in the Mid-IR Region at Vacuum

Cited by 3 publications

References 29 publications

Real-Time Reflectance Measurement Using an Astigmatic Optical Profilometer

Real-Time Reflectance Measurement Using an Astigmatic Optical Profilometer

Spectral radiation drift behavior of near-infrared laser by the complete hemispherical reflection method

Ellipsoidal Reflectors for Biological Media Light Scattering Photometry

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