2002
DOI: 10.1063/1.1469662
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Reflection–absorption infrared investigation of hydrogenated silicon oxide generated by the thermal decomposition of H8Si8O12 clusters

Abstract: Reflection-absorption infrared spectroscopy has been employed to observe Si-H bonds within a model, ultrathin silicon oxide. Upon heating a monolayer of H 8 Si 8 O 12 /Si͑100Ϫ2ϫ1 to 700°C, Si-H bonds as a part of HSiO 3 entities are still detected within the oxide layer after cooling. These fragments appear to be stable to temperatures of at least 850°C. Reversible hydrogen/deuterium exchange for these entities is also directly observed.

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Cited by 3 publications
(4 citation statements)
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“…Destruction and evaporation of such atomic clusters should require more energy. That is why the appearance of a small residual I 85 peak after annealing at 950 • С (in contrast to the effect observed in Nicholson and Zhang 26 ) does not contradict our hypothesis. Perhaps crystalline octahydridooctasilsesquioxane defects can be destroyed at a higher temperature.…”
Section: Breaking Up Of Octahydridooctasilsesquioxane Clusters During...contrasting
confidence: 65%
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“…Destruction and evaporation of such atomic clusters should require more energy. That is why the appearance of a small residual I 85 peak after annealing at 950 • С (in contrast to the effect observed in Nicholson and Zhang 26 ) does not contradict our hypothesis. Perhaps crystalline octahydridooctasilsesquioxane defects can be destroyed at a higher temperature.…”
Section: Breaking Up Of Octahydridooctasilsesquioxane Clusters During...contrasting
confidence: 65%
“…To verify our assumption about the formation of H 8 Si 8 O 12 defects, a ground and deeply‐etched silica plate was annealed at 950°С. The annealing temperature was chosen to be larger than the limit of temperature stability of H 8 Si 8 O 12 , equal to ∼850°С according to Nicholson and Zhang 26 . The dependence of the I 85 height against the annealing duration is shown in Figure 8.…”
Section: Resultsmentioning
confidence: 99%
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