Reflectance of Metal Grid Lines Calculated by Free Path Theory

Abstract

In this paper we present a model to investigate the reflectance on a metallic grid line. Based on the free path theory in the basic physics, we derived a corrected expression for calculating the free path in a metallic grid line. Then, we obtain a formula for describing the dependence of optical reflectance on its size. The theoretical results show that the size of grid line has a relatively large effect on its reflectance when the width and thickness of grid line are below 300nm. The reflectance will reach the value of bulk material when the width and thickness of grid line are over 800nm.